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Title:
SLOT VALVE AND SUBSTRATE TREATMENT APPARATUS INCLUDING SAME
Document Type and Number:
WIPO Patent Application WO/2020/256259
Kind Code:
A1
Abstract:
A slot valve according to an embodiment comprises: a blade which opens and closes an opening portion formed in a side wall of a chamber; a driving unit which is accommodated within the side walls of the chamber and reciprocates the blade in the horizontal direction; and a shaft connecting the blade and the driving unit, wherein the blade can be made flush with the inner surface of the chamber by a closing operation of the driving unit.

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Inventors:
LEE YONG HYUN (KR)
YANG GEUN SU (KR)
YOO KWANG SU (KR)
CHONG CHEOL WOO (KR)
Application Number:
PCT/KR2020/004671
Publication Date:
December 24, 2020
Filing Date:
April 07, 2020
Export Citation:
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Assignee:
JUSUNG ENG CO LTD (KR)
International Classes:
H01L21/677; F16K3/02; F16K27/04; H01L21/67
Foreign References:
KR20140084983A2014-07-07
KR20050062751A2005-06-27
KR20100058210A2010-06-03
KR20090088734A2009-08-20
KR100857232B12008-09-05
Attorney, Agent or Firm:
LEE, Seung Chan (KR)
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