SOLID-STATE IMAGING ELEMENT AND METHOD FOR MANUFACTURING SAME

Title:

SOLID-STATE IMAGING ELEMENT AND METHOD FOR MANUFACTURING SAME

Document Type and Number:

WIPO Patent Application WO/2017/082429

Kind Code:

A1

Abstract:

Provided are a solid-state imaging element and a method for manufacturing a solid-state imaging element by which a solid-state imaging element is able to be formed at lower cost. A method for manufacturing a solid-state imaging element (1a) according to one embodiment of the present invention, said solid-state imaging element (1a) being provided with a base (2), a plurality of microlenses (6) that are formed on one surface of the substrate (2), and a concave lens (7) that is formed in the boundary part between adjacent microlenses (6) among the plurality of microlenses (6) and is recessed toward the one surface of the substrate (2), comprises a lens formation step wherein the microlenses (6) and the concave lens (7) are formed in a lump by a photolithography method using a gray tone mask (50).

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Inventors:

KUMAI KOICHI (JP)
GORAI RYOHEI (JP)

Application Number:

PCT/JP2016/083725

Publication Date:

May 18, 2017

Filing Date:

November 14, 2016

Export Citation:

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Assignee:

TOPPAN PRINTING CO LTD (JP)

International Classes:

H01L27/14; G02B3/00; H04N5/369

Foreign References:

JP2015158663A	2015-09-03
JP2012099639A	2012-05-24
JP2009031399A	2009-02-12

Other References: