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Title:
SPRAY COATING MATERIAL AND SPRAY COATING MADE OF SAME SPRAY COATING MATERIAL
Document Type and Number:
WIPO Patent Application WO/2019/124660
Kind Code:
A1
Abstract:
The present invention relates to a yttrium aluminum oxyfluoride spray coating material and, more particularly, to a spray coating material with excellent plasma resistance that is produced by mixing, assembling, and baking 30-70% by mass of yttrium fluoride (YF3) and a balance of alumina (Al2O3) and yttrium aluminum garnet (YAG), and to a spray coating.

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Inventors:
YI SUNGHWAN (KR)
KIM YEOWOOL (KR)
JUNG CHAEJONG (KR)
KO HYUNCHUL (KR)
Application Number:
PCT/KR2018/008078
Publication Date:
June 27, 2019
Filing Date:
July 17, 2018
Export Citation:
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Assignee:
KOMICO LTD (KR)
International Classes:
C23C4/04; C04B35/50; C23C4/134
Foreign References:
KR20090082149A2009-07-29
JP2010156009A2010-07-15
KR101721232B12017-03-29
KR20080089130A2008-10-06
KR20170048177A2017-05-08
US20130288037A12013-10-31
Attorney, Agent or Firm:
GHONG-GAN INTERNATIONAL PATENT LAW FIRM (KR)
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