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Title:
STRUCTURE HAVING PLURAL CONDUCTIVE REGIONS AND PROCESS FOR PRODUCTION THEREOF
Document Type and Number:
WIPO Patent Application WO/2009/148144
Kind Code:
A3
Abstract:
A structure having a plurality of conductive regions insulated electrically from each other comprises a movable piece supported movably above the upper face of the conductive region, the movable piece having an electrode in opposition to the conductive region, the structure being constructed to be capable of emitting and receiving electric signals through the lower face of the conductive region, the plural conductive regions being insulated by sequentially connected oxidized regions formed from an oxide of a material having through-holes or grooves.

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Inventors:
KANDORI ATSUSHI (JP)
CHANG CHIENLIU (JP)
TAKAGI MAKOTO (JP)
Application Number:
PCT/JP2009/060298
Publication Date:
September 30, 2010
Filing Date:
May 29, 2009
Export Citation:
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Assignee:
CANON KK (JP)
KANDORI ATSUSHI (JP)
CHANG CHIENLIU (JP)
TAKAGI MAKOTO (JP)
International Classes:
B81B3/00
Domestic Patent References:
WO2006123298A22006-11-23
Foreign References:
US20010013630A12001-08-16
US20080290490A12008-11-27
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