SUPERHEATED STEAM PROCESSING DEVICE

Title:

SUPERHEATED STEAM PROCESSING DEVICE

Document Type and Number:

WIPO Patent Application WO/2015/060140

Kind Code:

A1

Abstract:

[Problem] To provide a superheated steam processing device with which an object being processed can be processed more efficiently by means of superheated steam containing a high concentration of hydroxyl radicals. [Solution] A superheated steam processing device equipped with: an induction heating device (4) that heats saturated steam by induction heating to generate superheated steam; a process chamber (5) into which the superheated steam generated by the induction heating device (4) is introduced; and a discharge processing device (6), which is arranged inside the process chamber (5) and performs a discharging process in the superheated steam that has been introduced. The discharge processing device (6) has: a frame that serves as a supporting body for the discharge processing device; discharge electrodes arranged on the upper part of the frame; a mesh-type counter electrode arranged beneath the discharge electrodes; and a high-frequency power source that provides a high-frequency high voltage between the discharge electrodes and the counter electrode, thereby generating a discharge. The objects being processed, which are positioned directly under the counter electrode, are processed by means of superheated steam in which the concentration of hydroxyl radicals has been increased by the discharge.

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Inventors:

FUJIMURA NAOTO (JP)

Application Number:

PCT/JP2014/077166

Publication Date:

April 30, 2015

Filing Date:

October 10, 2014

Export Citation:

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Assignee:

SHINETSU CHEMICAL CO (JP)

International Classes:

H05B6/10; F22G1/16

Domestic Patent References:

WO2009148000A1	2009-12-10
WO2004005798A1	2004-01-15
WO2009148000A1	2009-12-10

Foreign References:

JP2002191338A	2002-07-09
JP2000065312A	2000-03-03
US20090223076A1	2009-09-10
JP2002191338A	2002-07-09

Other References: