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Title:
TRANSPORTATION DEVICE, VACUUM DEVICE
Document Type and Number:
WIPO Patent Application WO/2012/124803
Kind Code:
A1
Abstract:
A transportation device in which a substrate is supported and moved by a robot hand among a plurality of chambers, wherein the transportation device is provided with a first detection means for detecting the substrate at a first detection position that is set on one surface of the substrate supported by the robot hand, and a second detection means for detecting the substrate at a second detection position that is set on one surface of the substrate supported by the robot hand.

Inventors:
FUJII YOSHINORI (JP)
Application Number:
PCT/JP2012/056844
Publication Date:
September 20, 2012
Filing Date:
March 16, 2012
Export Citation:
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Assignee:
ULVAC INC (JP)
FUJII YOSHINORI (JP)
International Classes:
H01L21/677; B25J13/08
Foreign References:
JP2008306162A2008-12-18
JP2008147631A2008-06-26
JPH1064971A1998-03-06
JP2001110873A2001-04-20
JP2008300648A2008-12-11
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
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