Title:
TREATMENT TANK FOR PRODUCTION PROCESS AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2013/008369
Kind Code:
A1
Abstract:
The objective of the present invention is to provide a reaction tank that can markedly increase production efficiency as reaction products do not substantially adhere to the inner wall surface thereof even with continuous use. Furthermore, the objective of the present invention is to provide a method that is for producing a structure of a production process treatment tank and a production process treatment tank using the structure and that, by means of the method for producing, can easily provide the structure of a production process treatment tank and the production process treatment tank using the structure such that reaction products do not substantially adhere to the inner wall surface thereof even with continuous use. The reaction tank is provided with a film comprising PFA at the inner wall surface of a main tank body. Also, the method for producing the reaction tank and the structure thereof provides a PFA layer to the inner wall surface by means of melting/remelting.
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Inventors:
IWAKI MASAMICHI (JP)
OHMI TADAHIRO (JP)
OHMI TADAHIRO (JP)
Application Number:
PCT/JP2012/002484
Publication Date:
January 17, 2013
Filing Date:
April 10, 2012
Export Citation:
Assignee:
UNIV TOHOKU NAT UNIV CORP (JP)
IWAKI MASAMICHI (JP)
OHMI TADAHIRO (JP)
IWAKI MASAMICHI (JP)
OHMI TADAHIRO (JP)
International Classes:
H01L21/205; B08B17/02; C23C16/44; C23C26/00; C25D11/18; H01L21/31
Domestic Patent References:
| WO2006134737A1 | 2006-12-21 | |||
| WO2007046414A1 | 2007-04-26 | |||
| WO2006135043A1 | 2006-12-21 |
Foreign References:
| JPH11165375A | 1999-06-22 | |||
| JP2010037581A | 2010-02-18 | |||
| JP2006128370A | 2006-05-18 | |||
| JPS63242608A | 1988-10-07 | |||
| JP2003047911A | 2003-02-18 |
Attorney, Agent or Firm:
OHTSUKA, Yasunori et al. (JP)
Yasunari Otsuka (JP)
Yasunari Otsuka (JP)
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Claims: