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WO/2014/176282A1 |
A protective cover for an electrostatic chuck may include a conductive wafer and a plasma resistant ceramic layer on at least one surface of the conductive wafer. The plasma resistant ceramic layer covers a top surface of the conductive ...
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WO/2014/171602A1 |
The present invention relates to an apparatus for fixing a work, and more particularly to a horizontal work fixing apparatus for fixing a work arranged horizontally. A horizontal work fixing apparatus according to the present invention i...
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WO/2014/171173A1 |
The present invention provides a positioning device capable of increasing the amount of diametrical expansion of an engaging member tightly attached to a cylindrical hole in a workpiece and a positioning device capable of performing posi...
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WO/2014/171271A1 |
Provided is a workpiece gripping device which causes gripping force and pressing force which is applied to a mounting surface to act on a workpiece. A movable fixture mechanism (20) and/or a stationary fixture mechanism (60) has a workpi...
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WO/2014/171604A1 |
A tilting table for processing a structure, according to the present invention, comprises: a first table having a workpiece put thereon; at least one second table having the workpiece put thereon and detachably coupled to the first table...
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WO/2014/171584A1 |
The present invention relates to a vacuum chuck for semiconductor production equipment used for flatness maintenance and chipping prevention, and more specifically concerns a vacuum chuck for semiconductor production equipment, the chuck...
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WO/2014/166464A1 |
The invention relates to a numerically controlled machining center, in particular a multi-axes dental boring and milling center, comprising a multi-axes boring and milling device which has a vertical spindle. The machining center has an ...
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WO/2014/167385A1 |
The invention is a new machining center comprising a bearing structure-frame (1) supporting the various other parts and an electric spindle (4) mounted on moving arms (4.1) suited to support said electric spindle (4) on said structure-fr...
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WO/2014/162022A1 |
The invention relates to a holding device for work benches and other uses, which is embodied on the basis of a vertical support (2) and a horizontal mobile arm (6) that can be rotatably moved around the vertical support (2) and longitudi...
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WO/2014/162556A1 |
A vertical machining center (1) has a table (20) that moves in the x-axis direction on a bed (10), and a gate-shape column (30) is provided with a tool headstock (70) that moves in the y-axis and z-axis directions. An automatic tool exch...
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WO/2014/156619A1 |
Provided is an electrostatic chuck device not only capable of suppressing a source of particles to more prevent particles from being attached to the rear surface of a plate-like sample, but also capable of improving the effect of cooling...
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WO/2014/157943A1 |
The present invention relates to a chuck for combining a full-stud bolt having a screw part, a flange part, and a connection part for connecting the screw part and the flange part to each other, and provides a chuck for combining a full ...
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WO/2014/157014A1 |
[Problem] To provide a chuck apparatus, which is capable of chucking a workpiece with an optimum holding force, irrespective of the weight and shape of the workpiece, and which is capable of dechucking the workpiece without damaging the ...
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WO/2014/157571A1 |
An electrostatic chuck of the present invention comprises: a ceramic dielectric substrate having a first principal surface on which an object to be suctioned is mounted, a second principal surface located on the opposite side to the firs...
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WO/2014/153925A1 |
A rotary cutting machine comprises: a spindle jacket (10) with an inner cavity; a spindle rotor (20), mounted in the inner cavity, a gap existing between the spindle rotor and the spindle jacket, the spindle rotor being provided with a f...
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WO/2014/149182A1 |
In one embodiment of the invention, a substrate support assembly comprises an electrostatic chuck having an electrode embedded therein and having an aperture disposed therethrough, a conductive liner disposed on the surface of the electr...
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WO/2014/146176A1 |
There is provided a magnetic clamping device (10) for magnetically clamping to a magnetically attracted material (30). The device comprises at least one permanent clamping magnet (14, 44) for magnetically clamping to the magnetically att...
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WO/2014/152977A1 |
Described are apparatus and methods for processing a semiconductor wafer so that the wafer remains in place during processing. The wafer is subjected to a pressure differential between the top surface and bottom surface so that sufficien...
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WO/2014/153364A1 |
A machining system includes a tool head having a yoke, a housing pivotally mounted to the yoke and a collet rotatable in the housing. The collet includes a tool head rocker driven by fluid to allow rocking of a tool relative to the colle...
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WO/2014/139237A1 |
A clamping device of a cutter of a cutting machine comprises: a mounting base (2) and a clamping component (4) mounted in the mounting base (2), a mounting portion (22) of the mounting base (2) being provided with an iron core (24), a co...
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WO/2014/141432A1 |
A chuck is configured from elements such as a body (2), a gripping claw (10) which is provided to the body (2), and a feed structure (20) which is provided within the housing chamber (4) of the body (2). The feed structure (20) is config...
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WO/2014/128553A1 |
A cutter (10, 200) capable of cutting multiple intersecting faces in an elongate workpiece (34) at precisely controlled angles or two faces at precise offsets in an elongate workpiece (34) that can be pivoted about its longitudinal axis....
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WO/2014/122333A1 |
The invention relates to a boring machine comprising a structure (11) that can move horizontally along a first horizontal axis (X), a carriage (130) mounted on the structure (11) and movable vertically along a vertical axis (Y), a ram (1...
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WO/2014/120082A1 |
A positioning system having a flat base comprising (i) a X-axis assembly having a X-axis linear actuator means arranged orthogonal to the Y-axis; (ii) a Y-axis assembly having a pair of Y-axis linear actuator means mounted onto the flat ...
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WO/2014/118977A1 |
There is a need for mechanizing work and improving production efficiency by automating the attachment and detachment of a cutting tool insert. Instead of a conventional manually screwed insert-fixing mechanism, the present invention prov...
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WO/2014/115628A1 |
A drive chamber (11) to and from which a pressurized fluid is supplied and discharged is arranged on the upper side of a piston (10) inserted in an ascendable/descendable manner inside a housing (1). A detection valve (32) for ascent det...
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WO/2014/115892A1 |
A clamping device (10) has a pair of first and second clamping arms (14, 16) rotatably supported with respect to a body (12), and a cam member (34) having a cam surface (40) is removably provided at one end of each of the first and secon...
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WO/2014/111002A1 |
An automatic floating tapping machine comprises a tapping machine (1), a hydraulic device (2), a floating clamping mould (3), a vibration feeding machine (4) and a controller (5). The problem that centers of a tee workpiece and a tapping...
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WO/2014/111003A1 |
An automatic floating tapping machine comprises a tapping machine (1), a hydraulic device (2), a floating clamping mold (3), a vibration feeding machine (4) and a controller (5). The problem that centers of a three-way workpiece and a ta...
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WO/2014/112486A1 |
Provided is a dielectric material in which signs of insulation damage can be detected before or during use, and therefore the insulation damage can be predicted in advance. Such a dielectric material comprises a compound sintered body in...
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WO/2014/108464A1 |
In order to provide a mechanical interface (13), in particular with a hybrid function and principle, in the field of micromachining for adapted and thus competitive manufacturing, a mechanical interface (13) for coupling one module to a ...
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WO/2014/108495A1 |
The invention relates to a device for clamping a turbine blade (9) having a perimetric surface that has a suction side (5) and a pressure side (7) and having a blade tip during a welding repair of the blade tip (11). The device comprises...
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WO/2014/109709A1 |
An exemplary shroud milling method includes milling a convex side of a shroud, milling a concave side of the shroud, and holding a shroud within a common fixture when milling the convex side and when milling the concave side.
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WO/2014/104123A1 |
A piston (10) is inserted into a housing (1) so as to be able to move up and down and is designed so as to be able to supply and evacuate pressurized oil to and from a drive chamber (11) located above said piston (10). An output rod (15)...
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WO/2014/099559A1 |
An electrostatic chuck includes a thermally conductive base having a plurality of heating elements disposed therein. A metal layer covers at least a portion of the thermally conductive base, wherein the metal layer shields the plurality ...
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WO/2014/098224A1 |
This electrostatic chuck is provided with: a base made from a ceramic, the base having a sample-holding surface on the upper surface and a heat medium channel in the interior; and a coating film coating the inner surface of the channel. ...
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WO/2014/087756A1 |
Provided is a fluid pressure cylinder capable of detecting, through the fluid pressure, that the piston member has moved to a set movement position, and of opening/closing a detection on/off-valve mechanism in linkage with the piston mem...
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WO/2014/083017A2 |
The present invention relates to a workpiece holder device for workpieces to be machined on multiple sides, wherein the workpiece can be held axially and radially relative to the first axis between a first workpiece holder, operatively c...
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WO/2014/084376A1 |
A machine tool is provided with: a main spindle device (101); an openable/closable shutter (105a) disposed between a tool magazine (103) disposed above a work room (WR) and the work room (WR); a tool exchange device (106); and a tool bre...
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WO/2014/084334A1 |
This electrostatic chuck includes: a ceramic base body having an upper surface that is to be an attraction surface to which a subject to be attracted is attracted; an attraction electrode; and a flow channel that is provided in the ceram...
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WO/2014/082974A1 |
The invention relates to a device for positioning a tubular workpiece, in particular an injection nozzle, on a retainer of a machine tool, said machine tool having a workpiece receptacle, which can be fastened to the retainer and which r...
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WO/2014/081708A1 |
A workholding fixture assembly includes a fixture plate configured to operate in cooperation with one or more corresponding workholding cylinders. The workholding cylinders may have distinct form factors that may be operabiy seated in co...
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WO/2014/080688A1 |
[Problem] To provide an electrostatic chuck and a power supply system, wherein high-voltage drive is performed without generating electrical discharge even in a vacuum atmosphere, and a structure of the power supply system for the electr...
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WO/2014/079884A1 |
The invention relates to a method for controlling tool changing operations on a machine tool. A machining process on a tool has a sequence of machining operations with respectively one defined tool (58) and respectively a defined duratio...
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WO/2014/078938A1 |
The invention relates to an automated method of assembling or processing components using computer numerical controlled drives to decouple the stages of delivering components to a tool, into a series of separately programmable stages, na...
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WO/2014/077030A1 |
To provide a fluid pressure cylinder and a revolving clamp device in which it is possible to detect, through the fluid pressure, that the movement of a piston member has reached the movement limit position, to obtain a high operation rel...
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WO/2014/072988A1 |
A rigid cartridge (200) for universal holding system comprises a cylindrical body (201), a guiding and locating body (204) connected to bottom side of cylindrical body (201), and a combination screw (205) having a left hand thread (207) ...
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WO/2014/071486A1 |
The present invention relates to an automatic device for securing parts to be worked, particularly by machining, shaping, reduction or expansion of the parts. More preferably, the automatic device according to the present invention compr...
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WO/2014/070333A1 |
A link clamp for holding a part on a fixture has a housing with a bore with a longitudinal axis; a piston received in the bore and shiftable between retracted and extended positions; a clamping lever pivotally connected to one end of the...
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WO/2014/060122A1 |
An interface structure (1) for automatic locking systems for the mounting of blanks that are associable with a plate (2) which can be associated with a base (4) for supporting a T-shaped element (7) which can move axially to an abutment ...
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