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WO/2007/135883A1 |
[PROBLEMS] To provide a vacuum pump where stationary blades and rotating blades do not interfere with each other even if the stationary blades are cut and formed into a semi-circular shape by inexpensive cutting or grinding method withou...
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WO/2007/125104A1 |
The invention relates to the rotors or stators of a turbomolecular pump having rotor blades that are produced from a special aluminum alloy.
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WO/2007/127169A1 |
A support system for a cooling fan for a heat exchanger. A suspension system supports an inner hub inside an outer support structure. The inner hub or ring supports the fan and motor. The suspension system includes an array of spiral sup...
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WO/2007/125106A2 |
The invention relates to a method for producing the rotors or stators of a turbomolecular pump having rotor blades that are produced from a special aluminum alloy.
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WO/2007/105785A1 |
This invention is directed to the easy formation of an impact buffer structure. An impact buffer structure for consuming impact energy is provided in a molecular pump in its flange (61d). An insertion hole (40d) is provided in a flange. ...
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WO/2007/099369A1 |
A rotor assembly for a multi-stage pump is provided. The assembly comprises a drive shaft, a rotor component and a drive component. The rotor component is located on the drive shaft and comprises a rotor element for displacing fluid thro...
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WO/2007/085124A1 |
An oscillating air flow low-noise composite fan blade includes a hub and an even number of blades equispacedly provided on the perimeter thereof ,wherein the opposing blades are symmetrically provided on the perimeter of th hub between t...
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WO/2007/068969A1 |
Apparatus for detecting a flammable atmosphere within a compressor during operation thereof is provided. The apparatus comprising a test chamber which is selectably connected between the compressor and an exhaust duct of the compressor u...
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WO/2007/066141A1 |
A method is described for inhibiting a deflagration within a vacuum pump. The method comprises the step of supplying to the pump during operation thereof a reactant for chemically reacting with solid material that has accumulated within ...
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WO/2007/045355A1 |
The invention relates to an apparatus for conveying a cooling air flow for at least one heat exchanger, especially for motor vehicles. Said apparatus comprises a fan frame (1) with a frame opening (2), a fan wheel (4) that revolves in th...
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WO/2007/042842A1 |
A vacuum pumping arrangement for evacuating an enclosure is provided. The arrangement comprises a turbomolecular vacuum pump having an inlet which is connectable using fixing members to an outlet of an enclosure to be evacuated. Each of ...
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WO/2007/041932A1 |
A double-drag molecular pump which has simple structure, is easily mass produced, and can enhance the effective pumped rate is disclosed. The double-drag molecular pump includes a helical stationary impeller(1) and a dynamic seal stage(8...
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WO/2007/035695A2 |
A fluid compression system (10) includes a compressor, an electric motor (15) including a stator (30) and a rotor (20) positioned adjacent to the stator, and a shaft (40) coupled to the rotor to support the rotor for rotation and having ...
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WO/2007/025865A1 |
A vacuum turbomolecular pump (10) is driven by a brushless direct current drive motor (16), which has stator coils and a permanent magnetic-exited motor rotor. When rotating, the motor rotor produces an electromotive force oriented count...
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WO/2007/025854A1 |
A vacuum pump (10) according to the invention has a pump rotor (14) and a pump stator (12). The pump rotor (14) has an electrical measuring transducer (44), for example a temperature sensor. A transmitting antenna (40), which is provided...
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WO/2007/025868A1 |
The invention relates to a method for coating articles from valve metals from aluminum, magnesium, titanium, niobium and/or zirconium and the alloys thereof with an oxide ceramic layer constituted of the metal and having a thin barrier l...
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WO/2007/022657A1 |
A magnetic bearing device (1) with an improved vacuum-tight electrical feedthrough through its housing (10) is disclosed. The feedthrough (30) comprises a flat connection element (31 ) such as a rigid or flexible printed circuit board ex...
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WO/2007/017366A1 |
Disclosed is a high-speed turbomachine comprising a magnetic bearing (22, 23) and a retainer bearing for mounting the rotor. The retainer bearing is embodied as a sliding bearing (26, 27) and encompasses a bearing shell (28) at the stato...
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WO/2007/013274A1 |
[PROBLEMS] To reduce the size of a vacuum pump device while eliminating vibration by efficiently removing the heat of a control circuit substrate incorporated in a controller without relying upon conventional forced air-cooling system an...
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WO/2007/010170A2 |
The invention concerns a device for vacuum pumping comprising at least one main pump (1) and one auxiliary pump (2) connected in series, respectively driven by a first electric motor (1b) and a second electric motor (2b) themselves power...
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WO/2007/004542A1 |
A turbo molecular pump capable of properly suppressing the reverse flow of a gas passed through slits in a fixed vane without lowering discharging performance. The turbo molecular pump is so formed that, when the fixed vane (30) is held ...
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WO/2006/137333A1 |
A turbo-molecular pump enabling an increase in assembling efficiency, wherein the outer diameter of a rotor on the air outlet side is smaller than the outer diameter of a rotor on the air inlet side. Spacer rings (31f) to (31h) are set o...
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WO/2006/131694A1 |
A turbomolecular vacuum pump (54) comprises a housing (70) and a rotor (52) supported by a bearing arrangement (64) for rotation relative to the housing (70). The bearing arrangement (64) comprises a bearing (72, 74, 76, 78) supported in...
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WO/2006/120132A1 |
The invention relates to a vacuum pump arrangement, particularly an arrangement of turbomolecular pumps, comprising a pump housing (10) with a rotor (14) and a stator (16). The pump housing (10) is connected to a vacuum chamber housing (...
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WO/2006/111695A1 |
A vacuum pump (50) comprises a casing and an impeller located in the casing, the impeller comprising a shaft (52) supported by a bearing arrangement for rotation relative to the casing. To supply lubricant to a rolling bearing (64) of th...
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WO/2006/106302A1 |
A method of controlling the temperature of an electronic circuit or other moisture sensitive component of a vacuum pump is described. The method comprises the steps of flowing a cooling fluid through a component cooling circuit to cool t...
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WO/2006/097679A1 |
A vacuum pumping arrangement for evacuating a chamber is described, in which the pumping arrangement comprises a plurality of booster pumps (12) connected in parallel to an inlet conduit (16) for receiving gas from the chamber (20), a pl...
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WO/2006/095132A1 |
Apparatus is described for inhibiting the propagation of a flame front ignited by a pumping mechanism drawing a waste stream from a process chamber. A combustion chamber comprises an inlet for receiving the waste stream exhaust from the ...
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WO/2006/089823A1 |
The invention relates to a Holweck vacuum pump comprising a pump rotor (16) with a rotating tube (24) and pump stators (12, 14), each having a screw-type threaded groove (21, 23) and being situated radially inside and radially outside th...
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WO/2006/090103A1 |
A vacuum pump comprises a first pumping section (106), and, downstream therefrom, a second pumping section (108). The pump comprises a first pump inlet (120) through which fluid can enter the pump and pass through both the first and seco...
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WO/2006/088714A2 |
A fluid handling and cogeneration system has an inlet conduit receiving a fluid, a housing having a inlet end, a outlet end and an interior surface. The housing encloses an inner body which together with the housing is arranged to form a...
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WO/2006/086166A1 |
A molecular drag compressor (22) includes a rotor disk (30,100) coupled to a drive shaft (34,106) for rotation about an axis, a stator (32,102,104) disposed about the rotor disk, the stator defining a tangential flow channel (110,112) , ...
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WO/2006/082864A1 |
A seal structure of a turbo-molecular pump capable of preventing exhaust gases and dust from invading into the bearing part and the motor part of the turbo-molecular pump and enabling a reduction in the length of a seal part. The seal st...
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WO/2006/075014A1 |
The invention relates to method for modifying a multistage compressor (101). According to said method, the turbine blades of the first compressor blade row (LA1) are exchanged for modified turbine blades having a blade profile (121) that...
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WO/2006/059027A1 |
The invention concerns a device for setting and controlling a low pressure gas mixture in a vacuum chamber (8) comprising at least one secondary molecular, turbomolecular or hybrid pump (9), followed by at least one primary pump (10) wit...
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WO/2006/059651A1 |
Any of surfaces brought into contact with other members of a touchdown-bearing-constituting inner ring, outer ring and rolling elements (balls) and, if any, retainer is provided with a calcium zinc phosphate coating and is further provid...
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WO/2006/060275A2 |
The present invention is an apparatus and method for evacuating a number of vacuum processing chambers containing incompatible gases. The gases are directed to a subatmospheric abatement chamber containing preconditioning devices. The ga...
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WO/2006/059204A1 |
A ventilating system, especially for a motor vehicle air conditioning system, comprises: a wall (4) for mounting an axial fan (2), the latter being equipped with a ring-shaped casing (6), with an axis (X), defined externally by a cylindr...
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WO/2006/051675A1 |
A shaft seal dustproof structure of a turbo molecular pump that evacuates corrosive gas or gas containing fine particles such as dust, capable of preventing intrusion of corrosive gas or fine particles into the motor housing of the turbo...
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WO/2006/048602A2 |
A differentially pumped vacuum system comprises first, second and third chambers, and a pumping arrangement for evacuating the chambers. The pumping arrangement comprises a compound pump having a first inlet connected to an outlet from t...
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WO/2006/048603A1 |
A vacuum pump (100) comprises a pumping mechanism having an annular pumping chamber (112, 114, 116) extending about a longitudinal axis (107) and through which fluid is pumped by the pumping mechanism. A plenum (126) located remote from ...
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WO/2006/042635A1 |
Disclosed is a supporting frame (104) that is to be mounted on a printed circuit board (2), is embodied like a drilling rig, and comprises a platform (117) which is provided with supporting legs (105, 106, 107, 108) for fixing the same t...
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WO/2006/040287A1 |
The invention relates to a rapidly rotating vacuum pump (10) comprising a compressor (12), a drive motor (14) for driving the compressor (12) and a timing gear (16) for operating the drive motor (14) at a constant nominal rotative freque...
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WO/2006/041113A1 |
A damper in which vibration in a specific frequency band can be reduced while keeping the degree of freedom of the fixing posture of a vacuum pump. A bellows (44) and an elastic member (45) are arranged at an interval large enough to pre...
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WO/2006/037730A1 |
A drag vacuum pump (10) comprises: a housing (12) that forms a vaneless pump stator (30); a rotor drive, and; a rotor bearing that holds a pump rotor (16) having vanes (18) in a manner that enables the rotor to rotate. The housing (12) s...
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WO/2006/036511A2 |
A fan is provided for use with a casing having a bellmouth and a conduit portion. The fan has a hub, a number of blades extending from the hub, and a shroud. In cooperation with the casing and the conduit portion surrounding the shroud, ...
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WO/2006/027961A1 |
A fixed vane of a turbo molecular pump suitable for reducing damage to the fixed vane. The ring-like fixed vane (B) of the turbo molecular pump is formed by abutting two fixed vane aggregates (30) on each other. In this state, a space pa...
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WO/2006/001243A1 |
A bearing support structure for a turbomolecular pump, capable of absorbing fine vibration occurring in a bearing section in a turbomolecular pump of a type in which a rotation shaft of a rotor is supported by rolling bearings, capable o...
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WO/2006/000745A1 |
A differentially pumped mass spectrometer system comprises a mass spectrometer having first and second pressure chambers through which, during use, ions are conveyed along a path. A pump assembly (10) for differentially evacuating the ch...
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WO/2005/124158A1 |
A radiation resisting molecular pump with excellent durability against radiation and high temperature baking capable of preventing the insulation of electric wire used in an internal wiring from being deteriorated even when used in those...
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