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WO/2011/102006A1 |
Provided is a vacuum pump provided with a rotor shaft (33) which is rotatably supported by a bearing and rotated at a high speed by a motor (36), and a rotor (30) which is fastened to an end of the rotor shaft (33) in the axial direction...
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WO/2011/092674A1 |
A high-vacuum pump (11) comprises a plurality of pumping stages, each comprising a plurality of mutually cooperating elements, including at least one rotating rotor element (1;13;33) and one stationary stator element. At least one of the...
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WO/2011/079511A1 |
A circulation boosting and ventilating air compressor comprises a compressor shell (1) and a rotor (2). The rotor (2) consists of a wind gear (3) and a drive shaft (4). The wind gear (3) consists of a shaft sleeve (5), a wind gear plate ...
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WO/2011/075204A1 |
The present invention provides a supersonic compressor comprising a supersonic compressor rotor (100) comprising a dockable rotor disk allowing restriction or opening of portions of a fluid flow channel of the rotor in order to enhance p...
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WO/2011/070589A2 |
A conical shape single rotor compressor is used for compressing the fluid such as air, gas or refrigerant. It comprises a conical shape Rotor placed horizontally in the taper housing which is stationery part of the compressor. The said r...
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WO/2011/070856A1 |
Disclosed is a cylindrical fixed member of a thread-groove exhaust pump unit, with which the cost of a vacuum pump can be reduced while the strength thereof against breakdown torque is maintained, in which thread grooves having complicat...
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WO/2011/052087A1 |
A turbo-molecular pump is provided with a drug pump composed of a rotational cylinder portion provided in a rotor and a stationary cylinder (24) disposed on the outer periphery of the rotational cylinder portion via a gap. The stationary...
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WO/2011/052675A1 |
A pump unit is provided with pump mechanisms (21, 31, 41), motors (22, 32, 42), an inverter (23), a control unit (24) which controls the inverter (23) and monitors the power level of the motors (22, 32, 42), and a storage unit (25) which...
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WO/2011/048396A1 |
The present invention provides a vacuum pump (10) which comprises a turbo- molecular pumping mechanism (12) in series with a Siegbahn pumping mechanism (14). A first pump inlet (16) is provided through which gas can pass through both the...
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WO/2011/036472A1 |
The invention provides a mass spectrometer system (10) comprising a mass spectrometer (12) comprising a plurality of mass spectrometer stages (16, 18, 20, 44) in fluid communication from a low vacuum stage (16) to a higher vacuum stage (...
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WO/2011/023448A1 |
A vacuum pump, in particular for use in a motor vehicle, with an inlet side for sucking in a fluid medium and an outlet side for delivering the medium which is sucked in to a surrounding area, has an outlet non-return valve on the outlet...
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WO/2011/024261A1 |
A turbo-molecular pump comprises a rotor (4) including multiple stage rotary vanes (19), multiple stage fixed vanes (21), and a pump casing (7) which is provided with a pump suction port (7a) and stores the rotor (4) and the multiple sta...
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WO/2011/024528A1 |
A vacuum pump configured in such a manner that, even if a rotating section closes the inner opening of a gas discharge outlet as a result of a reduction in the height of the vacuum pump, the possibility of a reduction in the gas discharg...
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WO/2011/021428A1 |
Provided is a vacuum pump wherein the temperature can be controlled using heating devices or cooling devices, the number of which is smaller than the number of the temperature sensors arranged on the pump. There are a plurality of temper...
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WO/2010/149738A1 |
The invention relates to a method for predicting a rotation fault in the rotor of a vacuum pump, including the following steps: recording sequences of events relating to the time variation of functional signals of the vacuum pump (101); ...
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WO/2010/142633A1 |
The invention relates to a vacuum pump, such as a turbomolecular pump, comprising a pump element (14), which is carried by a shaft (12). The shaft (12) is supported in a pump housing (10) by means of a first bearing arrangement (24) and ...
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WO/2010/115420A1 |
The invention relates to a compressor arrangement (1) having an axial compressor (10) and a radial compressor (20) disposed one after the other on a common driveshaft (30) that can be coupled to a drive (60), and each comprising a compre...
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WO/2010/116747A1 |
Provided is a surface-treatment method for components of mechanical booster pumps, turbomolecular pumps, or dry pumps, said method resulting in high resistance to corrosion and low outgassing. Also provided is a dry pump treated with sai...
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WO/2010/111357A2 |
Hydrogen gas compression systems that each include a multistage centrifugal compressor in which each stage has an inlet-to-outlet pressure rise ratio of about 1.20 or greater. In one embodiment, the multistage compressor includes six hig...
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WO/2010/105908A1 |
The invention relates to a multi-inlet vacuum pump having a first pump device (10) and a second pump device (12). The first pump device (10) comprises a first rotor element (18) having a plurality of first rotor discs (20, 21) arranged c...
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WO/2010/100626A1 |
The pumping device comprises a central body (1) closed by a couple of headers (2, 3) and is internally provided with a separating disk (4), suitable to divide the inner space into a first and a second chamber (10, 11) separated. The devi...
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WO/2010/098192A1 |
A turbo molecular pump is provided with: a rotor (30) having formed thereon a multi-stage rotating blades (32) and rotating at high speed; fixed blades (33) arranged alternately relative to the rotating blades (32) in the pump axis direc...
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WO/2010/097384A2 |
The invention relates to a multi-inlet vacuum pump having a first pump device (10) provided with a first rotor element (18) comprising several first rotor disks (20) which are arranged successively in the conveying direction (36), and a ...
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WO/2010/095218A1 |
If the natural frequency of a rotor fluctuates, a spindle vibration may be excited and oscillated when the rotor is arranged in the unstable region of a filter inside of a control circuit. In order to realize the stabilization of the spi...
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WO/2010/089579A1 |
First and second pump stages provide a flow-path from an inlet to the outlet (30), the flow-path being arranged so that molecules entering the first inlet (26) pass to the outlet through the first (120) and second (122) pump stage, and s...
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WO/2010/081294A1 |
An axial-flow type electronic radiator fan includes a fan blade (5) and a motor. The fan blade (5) is formed in multi-stage blade structure or single-stage blade structure. The single-stage blade structure is that all of the fan blades a...
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WO/2010/072568A1 |
The invention relates to a vacuum pump, particularly a Holweck vacuum pump, comprising a pump housing (34), in which a rotor element (24, 36) is arranged. The rotor element comprises at least two tube-shaped conveying elements (24), whic...
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WO/2010/069814A1 |
The invention relates to a vacuum pump comprising at least one pump element (12) arranged in a housing (10). The pump element is supported by a shaft (14). A fastening flange (20) is connected to the housing (10) in order to fasten the p...
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WO/2010/066540A1 |
An impeller for a fan has a hub (1), in which a receptacle (8) for a shaft is formed, and a multiplicity of vanes (2) which are fastened to the hub (1). At least one elastic damping body (6) is provided on the hub (1) so as to be arrange...
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WO/2010/064321A1 |
A vacuum pump comprises a rotary body rotating at a high speed, a pump casing having an air suction port and storing the rotary body, and a protection net which is attached to the suction port and formed by integrally laminating a plural...
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WO/2010/058002A1 |
The invention relates to a method for operating a multistage compressor (CO), comprising monitoring the pump limit (SL), wherein at least a first measurement parameter measured during operation is compared to a reference parameter, said ...
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WO/2010/057834A1 |
A turbomolecular pump comprises a rotor element (12) disposed in a pump housing (18). The rotor element (12) is surrounded by a stator element (24). An intermediate chamber (36) is provided between the stator element (24) and the pump ho...
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WO/2010/052056A1 |
A vacuum pump rotor, particularly a turbomolecular pump rotor, comprises a plurality of separate rotor elements (10). Each rotor element (10) comprises at least one rotor disc (18). The rotor disc (18) is connected to a cylindrical proje...
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WO/2010/042958A2 |
A pedestal fan comprising fan grill with diverting surface and wind direction changing mechanism is provided, in which the wind direction changing mechanism comprising a steel plate (10) provided a funnel (lO.a), one end of the funnel is...
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WO/2010/038896A1 |
Disclosed is a turbo-molecular pump, wherein in connection with a dimensionless number (X), that is, the ratio between an inter-blade distance (S) of the moving blade of a rotary vane (4B) and the stationary blade of a fixed blade (2B) a...
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WO/2010/031977A1 |
The turbomolecular pump with a flexible mount includes: a sealed housing (100) mounted by means of a mechanical damper (150) onto a frame (160); a vertical mounting (102) driven by an electric motor (140); radial magnetic bearings (111, ...
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WO/2010/023200A1 |
A stator-rotor arrangement for a vacuum pump, in particular for a turbomolecular pump, comprises a plurality of stator discs (18) that cooperate with a rotor element (14), said stator discs being disposed between rotor discs (16). The st...
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WO/2010/021307A1 |
Provided is a vacuum pump in which the temperature of a rotor is more accurately detected by a simpler method. A sensor unit in which a thermistor (51) is fixed to a frame (53) by a thin film such as a polyimide film is disposed on a sta...
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WO/2010/016141A1 |
A rotary vacuum pump has a rotor (4) rotatably supported on a base (3), a stator (43) disposed around the rotor (4), an outer casing (2) in which the stator (43) is received, fastening devices (71) for fastening together a flange surface...
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WO/2010/015847A1 |
A vacuum pump surrounded by a ballistic blanket.
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WO/2010/015501A1 |
A rolling-element bearing for bearing rotating components in vacuum devices comprises a plurality of rolling elements (10) arranged between bearing elements (12, 14). A bearing compartment (26) is for example closed by sealing elements (...
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WO/2010/012526A1 |
A vacuum pump, in particular a turbomolecular pump or a multi-inlet pump, comprises a rotor shaft (12) that supports at least one rotor device (14). The rotor shaft (12) is mounted on the pressure side by way of a bearing arrangement (56...
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WO/2010/007975A1 |
Provided is a vacuum pump which can detect precisely the physical contact between a rotary portion and a stationary portion and the arrival of the accumulation of a solid product at the clearance between the rotary portion and the statio...
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WO/2009/156286A1 |
A shaft arrangement for fast-rotating shafts, such as are used as rotor shafts for turbomolecular pumps in particular, comprises two separate shaft journals (10) that are connected together. A roller bearing (12) is disposed at each of t...
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WO/2009/153874A1 |
A turbo-molecular pump comprises a rotating body (3) having multiple stages of rotary vanes (31) formed in the axial direction and a rotary cylindrical part (32) formed on the exhaust side, a stacked body (23) formed by stacking multiple...
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WO/2009/147426A1 |
The present invention relates to a vacuum pumping system (10) which comprises: a vacuum pumping mechanism (12) and a motor (14) for driving the vacuum pumping mechanism. Means (16) are provided for determining a cumulative load on the va...
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WO/2009/147241A2 |
The invention relates to an apparatus for indirect conversion of ocean wave energy into electric energy or into mechanical work. In this regard the apparatus comprises at least one floating element, a lever arm connected to the floating...
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WO/2009/141222A1 |
The invention relates to a multi-stage vacuum pump, comprising a plurality of rotor elements (14, 16) disposed on a common shaft (10) in a pump housing (12) for configuring multiple pump stages (18, 24, 26). The shaft is driven by an ele...
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WO/2009/142905A1 |
A method of depositing a material on a substrate comprises placing a substrate into a process space in fluidic communication with a Gaede pump stage (GPS). A precursor gas is then injected into the process space while injecting a draw ga...
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WO/2009/133106A1 |
A vacuum pump has a suction chamber (12), in which multiple pump elements (14) are disposed. The suction chamber (12) is connected to a container (28) for receiving a cleaning liquid. Sound waves can be generated via noise generators (34...
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