Title:
FILM-FORMATION DEVICE OF METAL FILM AND FILM-FORMATION METHOD OF METAL FILM
Document Type and Number:
Japanese Patent JP2023058770
Kind Code:
A
Abstract:
To provide a film-formation device and a film-formation method which suppress accumulation of an electrolytic solution between a solid electrolyte membrane and a base material, and thereby can form a homogeneous metal film.SOLUTION: A film-formation device 1 of a metal film F includes at least an anode 11, a solid electrolyte membrane 12 arranged between the anode 11 and a base material W, a power source part 13 for energizing an electric current between the anode 11 and the base material W, a mounting table 15 which is formed with a storage recess 15a according to the shape of the base material W, and allows the base material W to be mounted thereon by storing the base material W in the storage recess 15a, and a housing 14 which is formed with a storage chamber 14a for storing an electrolytic solution S together with the anode 11, and is mounted with the solid electrolyte membrane 12 for sealing the storage chamber 14a, wherein the mounting table 15 is provided with a liquid discharge part 30 for discharging the electrolytic solution S having penetrated through the solid electrolyte membrane 12 from a position facing an end face 14c of a side wall 14b of the housing 14.SELECTED DRAWING: Figure 1
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Inventors:
KONDO HARUKI
Application Number:
JP2021168472A
Publication Date:
April 26, 2023
Filing Date:
October 14, 2021
Export Citation:
Assignee:
TOYOTA MOTOR CORP
International Classes:
C25D21/00; C25D5/02; C25D17/00
Attorney, Agent or Firm:
Patent Attorney Corporation Hiraki International Patent Office