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Title:
IMAGE FORMING MATERIAL HAVING BLUE-VIOLET LASER PHOTOSENSITIVE RESIST MATERIAL LAYER AND METHOD FOR FORMING RESIST IMAGE
Document Type and Number:
Japanese Patent JP3915650
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To provide an image forming material having a blue-violet laser photosensitive resist material layer which is highly sensitive to laser light in a blue-violet region and excellent in safe-light property for a yellow lamp, and which causes no decrease in the sensitivity when the film thickness is increased, and further to provide a method for forming a resist image.
SOLUTION: The image forming material having a blue-violet laser photosensitive resist material layer has a blue-violet laser photosensitive resist material layer on a processed substrate and has a protective layer thereon. The photosensitive resist layer has the maximum peak in the spectral sensitivity in the wavelength region from 390 to 430 nm and ≤10,000 μJ/cm2 minimum exposure dose [S410] capable of image forming at 410 nm wavelength, with ≤0.1 ratio [S410/S450] of the minimum exposure dose [S410] capable of image forming at 410 nm wavelength to the minimum exposure dose [S450 (μJ/cm2)] capable of image forming at 450 nm wavelength. The resist image is formed by scanning the photosensitive resist material layer of the image forming material with laser light at 390 to 430 nm wavelength for exposure thereto, and then developing it.


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Inventors:
Urano Toshiyoshi
Yasuhiro Kameyama
Application Number:
JP2002294622A
Publication Date:
May 16, 2007
Filing Date:
October 08, 2002
Export Citation:
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Assignee:
Mitsubishi Chemical Corporation
International Classes:
G03F7/027; G03F7/028; G03F7/004; G03F7/033; G03F7/038; G03F7/039; G03F7/11; G03F7/26; (IPC1-7): G03F7/027; G03F7/11; G03F7/26
Domestic Patent References:
JP8029972A
JP11030858A
JP10010719A
JP10312055A
JP11052575A
JP7239547A
JP8220744A
JP2001194782A
JP2000098605A
JP2002182391A
JP2002182390A
JP2002182389A
JP2002023359A
JP2001133973A
JP2000206690A
JP2001154344A
JP2001100411A
JP2000206681A
JP2000194126A
JP2002083687A
JP2002169282A
Attorney, Agent or Firm:
Hasegawa Soji



 
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