STORAGE DEVICE - TOSHIBA MEMORY CORP

Title:

STORAGE DEVICE

Document Type and Number:

Japanese Patent JP2017168709

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide a storage device with higher storage density.SOLUTION: A storage device includes a first conductive layer, a second conductive layer, a first oxide layer, a second oxide layer, and an intermediate layer. The first oxide layer is provided between the first conductive layer and the second conductive layer. The second oxide layer is provided between the first oxide layer and the first conductive layer. The intermediate layer is provided between the first oxide layer and the second oxide layer. The intermediate layer includes silicon nitride and a plurality of first metal atoms. The first density of the coupling between the first metal atoms in the intermediate layer is lower than the second density of the coupling between the first metal atom and the nitrogen atom in the intermediate layer.SELECTED DRAWING: Figure 1

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Inventors:

MATSUSHITA DAISUKE
INO TSUNEHIRO
NAKASAKI YASUSHI

Application Number:

JP2016053421A

Publication Date:

September 21, 2017

Filing Date:

March 17, 2016

Export Citation:

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Assignee:

TOSHIBA MEMORY CORP

International Classes:

H01L27/105

Attorney, Agent or Firm:

Masahiko Hinataji

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