Title:
METHOD OF MANUFACTURING MICROSTRUCTURE
Document Type and Number:
Japanese Patent JP2011246780
Kind Code:
A
Abstract:
To obtain piezoresistance characteristics in a microstructure made of diamond like carbon manufactured with focused ion beams.
A substrate is irradiated with the focused ion beams with raw material gas supplied onto it to form the microstructure made of diamond like carbon on a part irradiated with the focused ion beams (step S101). Then, the formed microstructure is heated to remove ions of the focused ion beams from the microstructure to make the microstructure exhibit the piezoresistance characteristics (step S102).
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Inventors:
YAMAGUCHI KOJI
NAGASE MASAO
OKAMOTO SO
KOMETANI REO
ISHIHARA SUNAO
WARISAWA SHINICHI
YUSA KOKI
NAGASE MASAO
OKAMOTO SO
KOMETANI REO
ISHIHARA SUNAO
WARISAWA SHINICHI
YUSA KOKI
Application Number:
JP2010122423A
Publication Date:
December 08, 2011
Filing Date:
May 28, 2010
Export Citation:
Assignee:
NIPPON TELEGRAPH & TELEPHONE
UNIV TOKYO
UNIV TOKYO
International Classes:
C23C16/48; B82B3/00; C01B31/02; C23C16/27
Other References:
JPN6013058073; 松井 真二: '高機能ナノ立体構造デバイス・プロセス' ［ｏｎｌｉｎｅ］ , ｈｔｔｐ：／／ｗｗｗ．ｊｓｔ．ｇｏ．ｊｐ／ｋｉｓｏｋｅｎ／ｃｒｅｓｔ／ｒｅｐｏｒｔ／ｈｅｉｓｅｉ１８
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Hiroro Kurokawa
Shigeki Yamakawa
Hiroro Kurokawa
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