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Patent Searching and Data


Title:
POSITIVE PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR MANUFACTURING PATTERN AND ELECTRONIC PART
Document Type and Number:
Japanese Patent JP2003345019
Kind Code:
A
Abstract:

To provide a positive photosensitive resin composition having high exposure sensitivity even in a thick film, showing high resolution and a preferable pattern profile and having excellent heat resistance.

The positive photosensitive composition contains: (A) a polyimide precursor or a polybenzoxazole precursor; (B) a compound which generates an acid by irradiation of actinic rays; (C) a compound having an acid decomposable group which increases solubility with an alkali aqueous solution by acid catalytic reaction; (D) a compound having two or more alcoholic hydroxyl groups; and (E) a solvent.


Inventors:
KATO KOJI
Application Number:
JP2002149430A
Publication Date:
December 03, 2003
Filing Date:
May 23, 2002
Export Citation:
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Assignee:
HITACHI CHEM DUPONT MICROSYS
International Classes:
G03F7/039; C08G73/10; C08G73/22; G03F7/004; G03F7/40; H01L21/027; (IPC1-7): G03F7/039; C08G73/10; C08G73/22; G03F7/004; G03F7/40; H01L21/027