To perform a work to allow a probe to approach a sample surface in nano probing in a short time.
A probe inspection apparatus 400 includes: a specimen support 10 for placing a sample 12; a probe 20 waiting at a standby position in the upper part of the specimen support 10; a first driver 160 for moving the specimen support 10 toward the standby position of the probe 20; a first charged particle gun 30 for radiating a first charged particle beam 32 in a direction for passage between the specimen support 10 and the probe 20; a first detector 120 for generating a signal to indicate that the sample 12 blocks the first charged particle beam 32; and a first control section 140 for controlling the first driver 160 through the use of the signal generated by the first detector 120.
Kana Nomoto
Satoshi Amagi