処理装置

Japanese Patent JP6631449

B2

PROBLEM TO BE SOLVED: To restrain defective conduction between a workpiece side conductor and a power source side conductor due to foreign matters generated in a processing chamber.SOLUTION: The processing device comprises: a processing chamber; a power source side conductor; a power source side insulator having an opening opened at one part on an upper face side of the power source side conductor and covering the power source side conductor; and a transportation part that has a workpiece side conductor electrically connected with a holding part holding a workpiece, and that is positioned at an upper part of the processing chamber in a vertical direction and can move in the vertical direction. The opening is arranged in the processing chamber. The transportation part applies power to the workpiece by making the workpiece side conductor into contact with an upper face of the power source side conductor through the opening, and isolates the workpiece side conductor from the upper face to transport the workpiece to the outside of the processing chamber. The upper face has a curve indented upward in the vertical direction or a corner part indented upward in the vertical direction, and is isolated from the power source side insulator.SELECTED DRAWING: Figure 4

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Kazutaka Iizuka
Kumamoto Shoichiro
Takashi Ikejiri

JP2016183712A

January 15, 2020

September 21, 2016

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TOYOTA JIDOSHA KABUSHIKI KAISHA

C23C16/50; H01B13/00; H01L21/3065; H01L21/31; H01M8/0202

JP2015094022A
JP2010040746A

Meisei International Patent Office

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