Title:
シンナー組成物及びこれを用いたフォトレジストの除去方法
Document Type and Number:
Japanese Patent JP4580249
Kind Code:
B2
Abstract:
A thinner composition includes propylene glycol ether acetate, methyl 2-hydroxy-2-methyl propionate, and an ester compound such as ethyl lactate, ethyl 3-ethoxy propionate or a mixture thereof.
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Inventors:
Lotion beauty
Choi Hyakuki
Whole sentence
Money
Youn
Park So Kei
Money
Lee Toki
Kim Kyomi
You Yue
Security
Choi Hyakuki
Whole sentence
Money
Youn
Park So Kei
Money
Lee Toki
Kim Kyomi
You Yue
Security
Application Number:
JP2005018565A
Publication Date:
November 10, 2010
Filing Date:
January 26, 2005
Export Citation:
Assignee:
SAMSUNG ELECTRONICS CO.,LTD.
International Classes:
G03F7/42; C09D9/00; C09D9/04; C11D1/00; C11D7/26; C11D11/00; G03F7/38; H01L21/027; H01L21/304
Domestic Patent References:
| JP2001188359A | ||||
| JP2000319692A | ||||
| JP6184595A | ||||
| JP8278637A | ||||
| JP2002031899A |
Foreign References:
| WO2003042762A1 |
Attorney, Agent or Firm:
Mikio Hatta
Yasuo Nara
Etsuko Saito
Katsuyuki Utani
Yasuo Nara
Etsuko Saito
Katsuyuki Utani