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Title:
【発明の名称】大型基板の乾燥方法および乾燥装置
Document Type and Number:
Japanese Patent JP2974619
Kind Code:
B2
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Inventors:
KANO TAKAHIRO
SHIMIZU HIDETAKA
TAKAHANE YOSHIAKI
Application Number:
JP23558596A
Publication Date:
November 10, 1999
Filing Date:
September 05, 1996
Export Citation:
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Assignee:
NORITAKE KANPANII RIMITEDO KK
International Classes:
G02F1/1333; F26B3/30; F26B15/00; F26B23/04; F26B25/00; G03F7/38; H01L21/304; (IPC1-7): F26B3/30; F26B15/00; F26B23/04; F26B25/00; G02F1/1333; G03F7/38; H01L21/304
Domestic Patent References:
JP63104681A
JP487772U
Attorney, Agent or Firm:
Haruyuki Ikeda (2 outside)



 
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