Title:
ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2015/163300
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a highly reliable acceleration sensor having minimal zero drift both initially and over time, even when used under poor installation conditions, while keeping production costs low. In this acceleration sensor, a weight that rotates when acceleration is applied in the z direction is positioned within a cavity that is surrounded by a supporting substrate and a cap layer. The cap layer is formed such that there is a difference in the mass per unit surface area between the two sides thereof situated to either side of the rotary shaft of the weight (see fig. 1).
More Like This:
Inventors:
JEONG HEEWON (JP)
HAYASHI MASAHIDE (JP)
HAYASHI MASAHIDE (JP)
Application Number:
PCT/JP2015/062043
Publication Date:
October 29, 2015
Filing Date:
April 21, 2015
Export Citation:
Assignee:
HITACHI AUTOMOTIVE SYSTEMS LTD (JP)
International Classes:
G01P15/125; G01P15/08; H01L29/84
Domestic Patent References:
| WO2005052602A1 | 2005-06-09 |
Attorney, Agent or Firm:
HIRAKI Yusuke et al. (JP)
Yusuke Hiraki (JP)
Yusuke Hiraki (JP)
Download PDF: