Title:
CALIBRATION STANDARD MEMBER, METHOD FOR MANUFACTURING THE MEMBER, AND SCANNING ELECTRONIC MICROSCOPE USING THE MEMBER
Document Type and Number:
WIPO Patent Application WO/2010/052840
Kind Code:
A1
Abstract:
Provided is a standard member for performing highly precisely a magnification calibration to be used in an electronic microscope.
A plane direction (110) or (100) silicon substrate containing a magnification calibration pattern composed of a periodic pattern of a constant pitch size and a plane direction (110) or (100) silicon substrate containing not the periodic pattern of the constant pitch size but an optical-axis adjusting pattern are joined by using no adhesive and by aligning the plane directions of the two substrates with each other. Next, the joined substrates are cleaved or diced so that the (111) plane or (110) plane thereof may be sectional surfaces, and one of the periodic patterns of the individual patterns is selectively etched to form the standard member which has a corrugated periodic pattern of a constant pitch size on a section having no any step and any damage on a super lattice pattern and being perpendicular to the substrate surface.
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Inventors:
NAKAYAMA YOSHINORI (JP)
TASE TAKASHI (JP)
YAMAMOTO JIRO (JP)
TASE TAKASHI (JP)
YAMAMOTO JIRO (JP)
Application Number:
PCT/JP2009/005562
Publication Date:
May 14, 2010
Filing Date:
October 22, 2009
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
NAKAYAMA YOSHINORI (JP)
TASE TAKASHI (JP)
YAMAMOTO JIRO (JP)
NAKAYAMA YOSHINORI (JP)
TASE TAKASHI (JP)
YAMAMOTO JIRO (JP)
International Classes:
G01B15/00; G01B1/00; G01B3/30; G01N23/225; H01J37/28
Foreign References:
| JP2008215824A | 2008-09-18 | |||
| JP2008261689A | 2008-10-30 | |||
| JPH0894346A | 1996-04-12 | |||
| JPH07218201A | 1995-08-18 | |||
| JPH04289411A | 1992-10-14 | |||
| JPS6432107U | 1989-02-28 |
Other References:
ICHIKO MISUMI ET AL.: "Nanometric lateral scale development with Si/Si02 multilayer thin-film structures and improvement of uncertainty evaluation using analysis of variance", MEASUREMENT SCIENCE AND TECHNOLOGY, vol. 19, no. 4, April 2008 (2008-04-01), pages 10
ICHIKO MISUMI ET AL.: "Application of a GaAs/InGaP superlattice in nanometric lateral scales", MEASUREMENT SCIENCE AND TECHNOLOGY, vol. 18, no. 9, September 2007 (2007-09-01), pages 2743 - 2749
ICHIKO MISUMI ET AL.: "Proceedings of XVIII IMEKO World Congress, 2006.09", September 2006, article "DESIGN AND FABRICATION OF NANOMETRIC LATERAL SCALE CONSISTING OF GaAs/InGaP SUPERLATTICE"
ICHIKO MISUMI ET AL.: "Application of a GaAs/InGaP superlattice in nanometric lateral scales", MEASUREMENT SCIENCE AND TECHNOLOGY, vol. 18, no. 9, September 2007 (2007-09-01), pages 2743 - 2749
ICHIKO MISUMI ET AL.: "Proceedings of XVIII IMEKO World Congress, 2006.09", September 2006, article "DESIGN AND FABRICATION OF NANOMETRIC LATERAL SCALE CONSISTING OF GaAs/InGaP SUPERLATTICE"
Attorney, Agent or Firm:
POLAIRE I. P. C. (JP)
Polaire Intellectual Property Corporation (JP)
Polaire Intellectual Property Corporation (JP)
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