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Title:
CARRIER FOR DEPOSITION
Document Type and Number:
WIPO Patent Application WO/2017/179829
Kind Code:
A1
Abstract:
Disclosed is a carrier for deposition, comprising: a body part having an opened upper part so as to expose an internal space part, and having deposition material accommodated in the internal space part; and a plate part formed in a plate shape, having a plurality of pores of which at least a portion are connected to each other, and located in the internal space part so as to come into contact with the body part, wherein at least a portion of the deposition material accommodated in the internal space part is introduced into the pores. The carrier for deposition improves deposition efficiency.

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Inventors:
KIM HYUN JOONG (KR)
KIM HONG CHUL (KR)
KIM JOUNG RAE (KR)
KIM CHUL HOON (KR)
CHOI BYEONG GYEONG (KR)
Application Number:
PCT/KR2017/003000
Publication Date:
October 19, 2017
Filing Date:
March 21, 2017
Export Citation:
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Assignee:
CEKO CO LTD (KR)
International Classes:
C23C14/24; C23C14/26
Foreign References:
KR20090011432A2009-02-02
JP2008150678A2008-07-03
KR20150002744U2015-07-13
KR20070028183A2007-03-12
KR20140017403A2014-02-11
Attorney, Agent or Firm:
BAE, Jung-Il (KR)
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