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Title:
CHARGED-PARTICLE-BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/013650
Kind Code:
A1
Abstract:
A charged-particle-beam device is characterized in that a template image to be used in template matching is automatically rotated, when conducting an automatic measurement, according to a predetermined procedure, of a pattern that is arranged on a sample and is symmetrical to the rotating axis, by an angle (θ1) calculated from the coordinates on the sample. With this method, it became possible to reduce the workload required when making a recipe, because the same template can be used repeatedly, which is the same as when observing or measuring multiple elements that are arranged repeatedly in grid-like form, when conducting an automatic measurement of a pattern regularly arranged symmetrical to the rotating axis.

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Inventors:
FUKAYA RITSUO (JP)
UEDA KAZUHIRO (JP)
Application Number:
PCT/JP2010/062586
Publication Date:
February 03, 2011
Filing Date:
July 27, 2010
Export Citation:
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Assignee:
HITACHI HIGH TECH CORP (JP)
FUKAYA RITSUO (JP)
UEDA KAZUHIRO (JP)
International Classes:
H01J37/22; G01B15/04; H01J37/147
Foreign References:
JP2005283139A2005-10-13
JP2008112596A2008-05-15
JP2009069073A2009-04-02
Attorney, Agent or Firm:
HIRAKI YUSUKE (JP)
Yusuke Hiraki (JP)
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