Title:
CHARGED-PARTICLE MICROSCOPE DEVICE, AND METHOD OF CONTROLLING CHARGED-PARTICLE BEAMS
Document Type and Number:
WIPO Patent Application WO/2010/147104
Kind Code:
A1
Abstract:
Provided is a charged-particle microscope device and a method of controlling charged-particle beams, wherein signals can be detected at a point of time when the electrified state of a sample to be observed or a defective section becomes optimum. A charge-standby time (T), which is the period of time from when a fist electron beam (21) for enhancing electrification is irradiated to the sample to be observed (100), to when the next electron beam (21) for observing the sample is irradiated, is configured according to the state of the sample to be observed (100), or the state of the defective section (112) produced on the sample to be observed (100); and the electron beam (21) for enhancing electrification and the electron beam (21) for observing the sample are irradiated towards the sample to be observed (100), based on this charge-standby time (T).
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Inventors:
OMINAMI YUSUKE (JP)
MIYAI HIROSHI (JP)
GUNJI YASUHIRO (JP)
MIYAI HIROSHI (JP)
GUNJI YASUHIRO (JP)
Application Number:
PCT/JP2010/060082
Publication Date:
December 23, 2010
Filing Date:
June 15, 2010
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
OMINAMI YUSUKE (JP)
MIYAI HIROSHI (JP)
GUNJI YASUHIRO (JP)
OMINAMI YUSUKE (JP)
MIYAI HIROSHI (JP)
GUNJI YASUHIRO (JP)
International Classes:
H01J37/28; H01J37/20; H01L21/66
Foreign References:
| JP2009027190A | 2009-02-05 | |||
| JP2008165990A | 2008-07-17 | |||
| JP2008166635A | 2008-07-17 | |||
| JP2009129660A | 2009-06-11 | |||
| JP2003083917A | 2003-03-19 |
Attorney, Agent or Firm:
HIRAKI, YUSUKE (JP)
Yusuke Hiraki (JP)
Yusuke Hiraki (JP)
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