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Title:
ELECTRON MICROSCOPE FOR MAGNETIC FIELD MEASUREMENT AND MAGNETIC FIELD MEASUREMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2017/208560
Kind Code:
A1
Abstract:
An electron microscope for measuring electromagnetic field information, wherein the electric field distribution and the magnetic field distribution of a sample are isolated and measured in a highly accurate manner. This invention comprises an electron source 1, an electron gun deflection coil 3, converging lenses 4a, 4b, an irradiation system astigmatism correction coil 5, an irradiation system deflection coil 6, a magnetic field application coil 8, an objective lens 11, an imaging system astigmatism correction coil 12, imaging system deflection coils 13a, 13b, a magnifying lens 17, an electron detector 18, and a control analysis device 20, etc. A first magnetic field is applied to a control analysis sample 10, then a first electron beam control is performed and first electromagnetic field information is measured by the output signal of the electron detector. Next, a second magnetic field is applied, then a second electron beam control is performed and second electromagnetic field information is similarly measured. The above process is repeated several times, and the electric field distribution and the magnetic field distribution of the sample are isolated and measured in a highly accurate manner from the obtained first and second electromagnetic field information.

Inventors:
TANIGAKI Toshiaki (6-6, Marunouchi 1-chome, Chiyoda-k, Tokyo 80, 〒1008280, JP)
SUGAWARA Akira (6-6, Marunouchi 1-chome, Chiyoda-k, Tokyo 80, 〒1008280, JP)
AKASHI Tetsuya (6-6, Marunouchi 1-chome, Chiyoda-k, Tokyo 80, 〒1008280, JP)
Application Number:
JP2017/009982
Publication Date:
December 07, 2017
Filing Date:
March 13, 2017
Export Citation:
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Assignee:
HITACHI, LTD. (6-6 Marunouchi 1-chome, Chiyoda-ku Tokyo, 80, 〒1008280, JP)
International Classes:
H01J37/22; H01J37/20; H01J37/26
Foreign References:
JP2005197165A2005-07-21
JP2002296333A2002-10-09
JP2012129137A2012-07-05
JP2014216180A2014-11-17
JPH08153485A1996-06-11
JPS5663761A1981-05-30
Other References:
M.BELEGGIA ET AL.: "On the transport of intensity technique for phase retrieval", ULTRAMICROSCOPY, vol. 102, no. 1, 2004, pages 37 - 49, XP004647099
J.N. CHAPMAN ET AL.: "The direct determination of magnetic domain wall profiles by differential phase contrast electron microscopy", ULTRAMICROSCOPY, vol. 3, 1978, pages 203 - 214, XP024740478
Attorney, Agent or Firm:
POLAIRE I.P.C. (13-11, Nihonbashikayabacho 2-chome Chuo-k, Tokyo 25, 〒1030025, JP)
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