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Title:
GYRO SENSOR ELEMENT
Document Type and Number:
WIPO Patent Application WO/2023/090349
Kind Code:
A1
Abstract:
A gyro sensor according to one aspect of the present disclosure comprises a first base part extending in a first direction, a pair of first drive arms extending from the first base part in a second direction intersecting the first direction, and a first detection arm extending from the first base part. A region of the first base part continuous with the base end of the first detection arm has a first groove extending in the second direction.

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Inventors:
SOEJIMA MUNETAKA (JP)
AONO SHIGEO (JP)
Application Number:
PCT/JP2022/042514
Publication Date:
May 25, 2023
Filing Date:
November 16, 2022
Export Citation:
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Assignee:
KYOCERA CORP (JP)
International Classes:
G01C19/5621
Foreign References:
JP2013007656A2013-01-10
JP2004007428A2004-01-08
JP2010117374A2010-05-27
JPH11281372A1999-10-15
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
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