| Document |
Document Title |
|
JP5429576B2 |
|
|
JP2014032533A |
To provide a servo system for enabling even a driver who does not have any communicating function to balance a load, and capable of suppressing an increase in costs.First and second drivers 31 and 41 of each servo motor 3 and 4 generate ...
|
|
JP5421844B2 |
|
|
JP5422368B2 |
A control unit performs servo control of a table, which is a load, by performing feedback control of a servomotor. An inverse characteristic model performs feedforward compensation control by obtaining a speed compensation signal that co...
|
|
JP5411978B2 |
A servo controller, capable of controlling the motion of a movable body with high accuracy, without depending on the position of the movable body which is moved on a ball screw. The servo controller has a position command generating part...
|
|
JP5405605B2 |
An electromagnetic actuator (300) includes a first and second magnetic members (310,320) that are displaceable relative to each other and are arranged to provide a magnetic circuit; and a coil (340.1, 340.2) configured to, in use, receiv...
|
|
JP5406861B2 |
A scanning exposure apparatus exposes a plurality of shot regions on a substrate to light while scanning an original and the substrate. The apparatus includes: a stage which holds the substrate and moves; and a controller which controls ...
|
|
JP2014021758A |
To reduce the possibility of the occurrence of overshoot.When a position deviation Δx between a position command Cp and a current position Yr is smaller than a first threshold β, a positioning control device 10 sets a speed command Vc ...
|
|
JP5400251B2 |
A manually directed, multi-channel electronic pipettor includes a software biasing mode to assure proper alignment over wells in the 96-well plate and the 384-well plate. The system also includes manual repositioning levers for nesting r...
|
|
JP5402401B2 |
|
|
JP5396786B2 |
|
|
JP5391523B2 |
|
|
JP5388823B2 |
|
|
JP5389251B2 |
To provide a parallel drive system that can reduce vibrations of an arm member and can realize positioning at a high speed even when a slave servomotor does not have a position detector, at a low cost. To achieve this object, a parallel ...
|
|
JP2014003211A |
To perform drive control of two stages without causing thrust interference.In a stage drive system (linear motor) for driving a base stage STA and a sub-stage STB by using a plurality of movers MGA, MGB, respectively, for a common stator...
|
|
JP5384608B2 |
|
|
JP5382777B2 |
|
|
JP2013257857A |
To suppress self-excited oscillation of a mechanical device caused by presence of a dead band between a drive shaft and a load shaft, in a simple configuration and reliable manner.A controller 14 controls a mechanical device 12 in which ...
|
|
JP5371714B2 |
To provide a device and method for generating a function for positioning, which requires short operation time of a CPU and a small number of memories to be used, and to provide an electric motor utilizing the same. A target position, a s...
|
|
JP5362795B2 |
To provide a stage moving device that is as low-cost as possible and in which a motors is easily controlled. A stage moving device 1 comprises: a single motor 100 that can rotate in both normal and reverse directions; an X-axis direction...
|
|
JP5355122B2 |
To provide a parameter estimation device for estimating the changing amounts of the control parameter of an actuator to be generated, with high accuracy according to the change of operating situations. A controller 6 is provided with a l...
|
|
JP5346674B2 |
To provide a marking control system that properly aligns two members by marking at any position or angle, even in pattern matching by a camera from any position, and to provide a method of aligning the members marked by the same. The mar...
|
|
JP2013232092A |
To obtain a motor control device reducing a synchronization error.A motor control device includes: drive controlling means 14 for controlling driving force to a motor of a drive shaft so as to make a position of the drive shaft follow a ...
|
|
JP5341554B2 |
To provide a positioning control unit, a positioning control method, and a positioning control program for improving positional accuracy in a positioning process. The positioning control unit 100 includes an operation amount calculating ...
|
|
JP2013228917A |
To provide an actuator controller that allows connected actuators to operate according to their characteristics without transmitting external input data of a large data size from a host device such as a PLC.An actuator controller, which ...
|
|
JP5332308B2 |
To provide a positioning device that detects a current coordinate with accuracy in an allowable error range when the power is turned on and starts an operation from the position when the power is turned on without performing a return ope...
|
|
JP2013225284A |
To provide a system and method for estimating inertia and friction coefficients of a machine system to be controlled.An inertia estimator 402 generates a torque command signal which continuously varies with time during a test sequence. T...
|
|
JP5328798B2 |
One embodiment of a system and method for meeting end conditions of a path plan utilizing a path generator that continuously generates commands for a path plan while tracking the total time expired in the path plan. The path generator co...
|
|
JP5331597B2 |
To provide a stage device for optimally controlling a brake mechanism to prevent the position deviation of a stage from being generated, even if the servo control of a motor is stopped, after the stage is positioned and the stage positio...
|
|
JP5322351B2 |
|
|
JP5319167B2 |
The controller (1) includes a position commander (3) and an error corrector (5). The position commander (3) outputs a position command value for moving a moving mechanism (2). The error corrector (5) includes a feedforward controller (51...
|
|
JP5314110B2 |
A motor control apparatus for synchronously controlling a master axis motor for driving a master axis and a slave axis motor for driving a slave axis, includes: a master axis position detector which outputs position data of the master ax...
|
|
JP5317568B2 |
The device has an arithmetic unit (30), where position values (P) such as current position value and previous position value, and a movement value (v) are assigned to the arithmetic unit, where the arithmetic unit determines movement inf...
|
|
JP5308249B2 |
Improved precision is realized in positioning control. Provided is a servo control device that is applied to a numerical control equipment provided with a screw-feeding section that converts rotational movement of a motor to linear movem...
|
|
JP5312670B2 |
Disclosed is a command generation device capable of switching the averaging time of a moving average filter to any value without producing errors in the movement distance. The command generation device comprises: a speed command generati...
|
|
JP5305391B2 |
To provide a servo control circuit which maintains a satisfactory control characteristic even in a high frequency area and is subjected to PID control that is easily incorporated into an integrated circuit. In the servo control circuit 1...
|
|
JP5302639B2 |
To suppress delay and oscillation caused by twisting and bending in a feeding mechanism and a mechanical element in a servo control apparatus applied to a machine tool, or the like. A frequency characteristic is measured for a servo cont...
|
|
JP5297759B2 |
To provide an industrial machine having a controller suppressing a follow error caused by change speed and correction of a target position. A three-dimensional measuring machine 1 has: a moving mechanism 2 for moving a probe for measurin...
|
|
JP5299255B2 |
To provide a robot control device capable of making a real operation locus of a robot become closer to a theory by properly compensating friction. In the case of driving an output shaft in a target driving direction from a condition wher...
|
|
JP5298339B2 |
To easily detect a positional dislocation quantity of an alignment object, by simplifying processing of an imaged image. This alignment device has an imaging means 1 for juxtaposing and having a plurality of light receiving elements 7 in...
|
|
JP5300897B2 |
This valve aperture control system, which performs opening/closing control that opens/closes a valve to a desired aperture, uses an output time computation means (17) to determine on the basis of a valve opening/closing speed an output t...
|
|
JP5293118B2 |
To suppress collision between an outer gimbal and an inner gimbal and variation in a visual line, in a control device for controlling the drive of the inner gimbal and the outer gimbal in a double gimbal mechanism. The control device for...
|
|
JP5295543B2 |
To provide a slide driving device capable of slidably driving a plurality of slide parts, in synchronism with one another. In this sliding driving device 1, wires 131, 132 are stretched between a movable plate 106 and the flanges 113, 11...
|
|
JP5284229B2 |
|
|
JP5284683B2 |
|
|
JP2013178613A |
To provide an alignment device of a process machine, capable of highly accurately performing centering adjustment even for a long process object.An alignment device includes a rotation mechanism 3 having a rotation holding part 2 for hol...
|
|
JP5279299B2 |
A position control apparatus includes a detecting unit (1) configured to detect a position of a control target, a subtracting unit (2) configured to subtract an output of the detecting unit from a target value, an iterative learning cont...
|
|
JP5283804B1 |
A servo control device includes a follow-up control unit that controls a control target that drives a mechanical system by a motor, a command function unit that has input therein a phase signal θ indicating a phase of a cyclic operation...
|
|
JP5278333B2 |
|
|
JP5272139B2 |
To prevent damage to a gimbal in a failure by providing a gimbal control system with a built-in test circuit and monitoring an excitation signal by means of the built-in test circuit. A gimbal control system with a built-in test circuit ...
|
