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JP2006062016A |
To form a microstructure having a micro space for displacement of the microstructure, with the space in a clean state.A peripheral sacrifice layer 105 of a contact electrode 106 is removed by dry etching through a first opening part 108 ...
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JP2005353333A |
To provide a microswitch with low power consumption and high reliability in a state for holding a switch.Beams 5 for a latch lying at both the adjacent sides of a thin-film heater 6 has a thermal insulation structure, a vertically movabl...
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JP3725688B2 |
To execute a logical operation for a plurality of input data via a single electrostatic moving contact element. A support beam 7 is fitted with a moving attraction electrode 5 in such a state as faced to moving part drive electrodes 2a a...
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JP2005536854A |
In methods and circuits for using associated circuitry to enhance performance of a micro-electromechanical switch, one of the method embodiments is a contact conditioning process including applying a time-varying voltage to the control e...
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JP2005536013A |
The present invention is a new type of relay that incorporates a functional combination of multiple multimorph actuator elements and multiple electrostatic state holding mechanisms in the development of a single micromachined switching d...
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JP2005536014A |
The present invention is a new type of relay that incorporates a functional combination of multiple multimorph actuator elements and multiple electrostatic state holding mechanisms in the development of a single micromachined switching d...
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JP2005534510A |
A method is provided for making a MEMS structure (69). In accordance with the method, a CMOS substrate (51) is provided which has interconnect metal (53) deposited thereon. A MEMS structure is created on the substrate through the plasma ...
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JP3714624B2 |
To provide a fine electric mechanical switch having a restoring force large enough to overcome static friction. This fine electric mechanical switch comprises a conductive beam 10 capable of being warped, and a plurality of electrodes wh...
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JP2005302711A |
To attain high drive speed and low drive voltage for an actuator and a switch using it.This actuator is provided with: a substrate 3 at least whose surface is insulated; a drive arm 4 whose at least one part is supported by the substrate...
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JP3709847B2 |
To enhance the performance of an actuator by displacing a movable body sequentially by means of a plurality of drive electrodes thereby setting the rigidity and displacement of the movable body at large levels. A movable body 4 is couple...
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JP2005294265A |
To provide an electric microswitch which is manufactured at relatively low cost, operates efficiently and has a long life.The liquid electric switch forming an electric path using a plurality of conducive droplets is disclosed. In a firs...
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JP2005277675A |
To provide a high frequency switch apparatus that makes switching at a low control voltage and can be manufactured at a low cost.Both ends of a dielectric support membrane 14 are fixed to a dielectric board 1 and the dielectric support m...
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JP2005527963A |
A MEMS switch assembly comprising a substrate and a resilient switching member is provided. The resilient switching member comprises a transverse torsion member having a flexible portion, and a leaf spring and cantilever that extend from...
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JP2005251549A |
To provide a microswitch capable of realizing low insertion loss, high isolation and low power consumption.A current is applied to a circuit pattern 8 for generating Lorentz force to generate the Lorentz force to bring a movable part 2 c...
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JP2005523823A |
A meso-scale MEMS device having a cantilevered beam is formed using standard printed wiring board and high density interconnect technologies and practices. The beam includes at least some polymer material to constitute its length, and in...
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JP2005209625A |
To provide a MEMS switch which is easy and delicate to manufacture and in which a sufficient ON/OFF electrostatic capacity variation ratio can be obtained.This is the MEMS switch which comprises a substrate 46, a conductive beam 42 forme...
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JP3677604B2 |
To provide a magnetic actuator keeping a large driving angle and realizing low-voltage driving. The magnetic actuator is constituted of a permanent magnet 27, a turning body 21 positioned in magnetic field generated by the magnet 27, a t...
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JP2005521196A |
The present invention relates to a nanotube device ( 100, 600 ), comprising a nanotube with a longitudinal and a lateral extension, a structure for supporting at least a first part of the nanotube, and first means for exerting a force up...
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JP2005184126A |
To provide a switching element that simplifies the structure and has a plurality of output sections facilitating work when the switching element is built into a high-frequency circuit.A high-frequency signal continuity line 3 is formed o...
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JP3669207B2 |
To improve contact stability by forming a recess, to which opposed tip edges of stationary contacts are overhung, between a pair of stationary contacts juxtaposed on the upper face of a stationary substrate and by forming an inclined fac...
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JP3669131B2 |
To prolong the service life of a contact, and improve contact reliability by partially removed a position immediately above a movable contact, and providing an intermediate insulation membrane and an auxiliary spring layer at which a gap...
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JP2005166622A |
To provide a reliable micro machine switch.This is a micro machine switch which controls conduction and non-conduction of two high frequency signal lines provided on a substrate with a gap. The micro machine switch has a cantilever arm f...
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JP2005166623A |
To provide a micro-machine switch small in size and high in function.On the micro-machnine switch which has a function of controlling the drive voltage by an output voltage of a DC-DC converter, the rear face of the DC-DC converter IC is...
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JP2005166512A |
To realize a relay easy to miniaturize and capable of providing satisfactory high frequency characteristics.The relay comprises first and second signal paths provided on an insulating base board; a third signal path provided on the base ...
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JP2005150110A |
To provide an SPDT microswitch of toggle type which takes advantage of a merit of two sorts of driving methods by switching with electromagnetic force while driving and keeping that condition with electrostatic force after switching.Low ...
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JP3651671B2 |
To provide a micromechanical device provided with a high performance characteristic by a simple structure and process. At least a pair of adjacently arranged beams 11 is formed with a predetermined gap on a silicon substrate 10 by surfac...
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JP3651404B2 |
To obtain the suitable contact separation force excellent in a high frequency characteristic with a simple and small-size structure that can be easily manufactured with low cost. Signal lines 5a, 5b formed on a fixed substrate 1 are arra...
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JP2005096039A |
To increase the displacement amount of a mass part without enlarging the whole size.A beam part 3 is formed in narrow and thin strip shape, and its shape from the thickness direction view of the mass part 2 is formed in a square spiral s...
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JP3637804B2 |
To make the size thin and appropriately open a contact by bending part of a moving electrode, contacting part of the moving electrode with a fixed electrode to elastically deform, and closing the moving contact to the fixed contact. A mo...
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JP3637805B2 |
To provide a micro-relay possible to be thinly formed preventing a movable base from being deformed, and capable of keeping contact in an excellent condition. In the structure of this micro-relay, a movable base 2 is bonded to a cap memb...
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JP3638160B2 |
PURPOSE: To provide an electret that has a high melting point and can be introduced to a semiconductor manufacturing process for easily achieving fine machining and thinning. CONSTITUTION: An SiO2 film 1 has a band structure consisting o...
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JP3636022B2 |
To actuate a micro-machine switch at low drive voltage and suppress warpage of a contact electrode by providing an intermediate electrode arranged opposed to a lower electrode on a flexible girder member supported by a support member on ...
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JP2005079604A |
To provide a signal transmission apparatus capable of controlling signal strength within a transmission band, or transmitting or interrupting a signal, and reducing a signal loss and making the area small or the like.The signal transmiss...
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JP3627108B2 |
PCT No. PCT/GB94/00977 Sec. 371 Date Nov. 6, 1995 Sec. 102(e) Date Nov. 6, 1995 PCT Filed May 6, 1994 PCT Pub. No. WO94/27308 PCT Pub. Date Nov. 24, 1994A bi-stable memory element (1) comprises a base contact (3), and a bridging contact ...
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JP2005055670A |
To provide an MEMS device in which wire bonding is easily performed when wiring an electrode and a movable substrate, and to provide a method of manufacturing by dicing without damaging the driving part or the like of the MEMS device, an...
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JP2005504415A |
A micromechanical switch is disclosed comprising a conductive beam (14, 14') partially suspended above a substrate (10), at least one contact electrode (12, 12') adjacent the conductive beam and at least one control electrode (13, 13') a...
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JP3619430B2 |
To provide an RF switch including a multiplicity of strokes and capable of being manufactured by utilizing only a single metallization layer, and to provide a manufacturing method of the RF switch. This switch includes an air bridge susp...
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JP2005011795A |
To provide an electrostatic micro electric machine system (MEMS) switch having numerous characteristics of an ideal switch.The MEMS switch (10) includes a substrate (12) and a non-stress beam (14) arranged on the substrate (12). In order...
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JP2004535938A |
An in-situ cap for an integrated circuit device such as a micromachined device and a method of making such a cap by fabricating an integrated circuit element on a substrate; forming a support layer over the integrated circuit element and...
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JP2004334191A |
To prevent undue wear on a micro electromechanical system (MEMS) device when the MEMS device is updated with the same data.A micro electromechanical system (30) has an electrostatically-controlled micro electromechanical system (MEMS) de...
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JP2004535654A |
Torsion springs for electromechanical switches are disclosed. The torsion spring includes a series of teeth including at least one tooth extending from the free end of the switch armature. The ends include conductive transmission lines t...
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JP3590872B2 |
A thin plate-shaped substrate 21 comprised of a monocrystal is provided with a piezoelectric element 24, and both ends of a movable piece 20 whose one surface is provided with a movable contact 25 are fixed and supported to a base 11. Th...
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JP3590283B2 |
To provide an electrostatic moving contact element capable of preventing a short circuit between a fixed attracted electrode and a movable attracted electrode and capable of being miniaturized and lowering the drive voltage. When a drive...
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JP2004319410A |
To provide a thin film for a contact electrode of a micro-machine switch, and to provide a sputtering target for depositing the thin film for a contact electrode of a micro-machine switch.The thin film for a contact electrode of a micro-...
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JP2004319215A |
To provide an electrostatic driver which is easy to manufacture, has a high yield and carries out performance as designed by suppressing an action error due to exterior force.A movable body 6 is installed on the top side of a coplanar li...
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JP2004319503A |
To provide a piezoelectric drive latching relay having a liquid metal contact.The electric relay using conductive liquid in a switching mechanism has a pair of switching contacts 118, 120 fitted to a free end of a piezoelectric actuator ...
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JP2004319411A |
To provide a thin film for a contact electrode of a micro-machine switch, and to provide a sputtering target for depositing the thin film for a contact electrode of a micro-machine switch.The thin film for a contact electrode of a micro-...
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JP2004533183A |
Method and apparatus for actuating switches in a reconfigurable antenna array. Micro electro-mechanical system (MEMS) switches span gaps between antenna elements disposed on an antenna substrate. An integrated optic waveguide network whi...
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JP2004281412A |
To provide a small electrostatic micro-relay having excellent high frequency characteristics.A fixed electrode 12 is provided on both sides of signal lines 13, 14 equidistant from the signal lines, and is used also for a high frequency G...
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JP3574102B2 |
A micro electromechanical switch has a guidepost formed upon a substrate. A signal transmission line is formed on the substrate, with the signal transmission line having a gap and forming an open circuit. The switch further includes a sw...
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