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Title:
電界効果トランジスタおよびその製造方法、ならびに高周波デバイス
Document Type and Number:
Japanese Patent JP2015207640
Kind Code:
A5
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Application Number:
JP2014086805
Publication Date:
March 30, 2017
Filing Date:
April 18, 2014
Export Citation:
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International Classes:
H01L21/768; H01L23/532; H01L21/336; H01L29/786; H01L29/78



 
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