Title:
基板処理装置
Document Type and Number:
Japanese Patent JP3559144
Kind Code:
B2
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Inventors:
Masami Otani
Application Number:
JP13327897A
Publication Date:
August 25, 2004
Filing Date:
May 23, 1997
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
B05C11/08; H01L21/027; (IPC1-7): H01L21/027; B05C11/08
Domestic Patent References:
| JP63209768A | ||||
| JP7029809A | ||||
| JP60083327A | ||||
| JP63161453A | ||||
| JP8203804A | ||||
| JP4074419U |
Attorney, Agent or Firm:
Shigeaki Yoshida
Yoshitake Hidetoshi
Takahiro Arita
Yoshitake Hidetoshi
Takahiro Arita