Title:
基板処理システム
Document Type and Number:
Japanese Patent JP5001354
Kind Code:
B2
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Inventors:
Hiroshi Nakamura
Application Number:
JP2009510655A
Publication Date:
August 15, 2012
Filing Date:
April 09, 2007
Export Citation:
Assignee:
Hirata Kiko Co., Ltd.
International Classes:
H01L21/677
Domestic Patent References:
| JPH1167866A | 1999-03-09 | |||
| JPH09216180A | 1997-08-19 | |||
| JP2001358194A | 2001-12-26 |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura