Title:
インプリント装置、および物品製造方法
Document Type and Number:
Japanese Patent JP6920939
Kind Code:
B2
Abstract:
To provide an imprint apparatus which is advantageous in terms of productivity.SOLUTION: An imprint apparatus 100 performs imprint processing of forming an imprint material pattern by curing an imprint material with a mold in contact with the imprint material on a substrate and separating the mold away from the cured imprint material. The imprint apparatus 100 includes a supply unit 32 that supplies a mold release agent onto the imprint material or to a pattern unit of the mold and a control unit 400 that controls the imprint processing based on history information of the mold including the supply history of the mold release agent by the supply unit.SELECTED DRAWING: Figure 1
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Inventors:
Hiroki Echigo
Shinichi Hirano
Shinichi Hirano
Application Number:
JP2017179007A
Publication Date:
August 18, 2021
Filing Date:
September 19, 2017
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; B29C33/58; B29C59/02
Domestic Patent References:
| JP2011205039A | ||||
| JP2013018214A | ||||
| JP2012060074A | ||||
| JP2014049720A | ||||
| JP2010214874A |
Foreign References:
| WO2008129962A1 |
Attorney, Agent or Firm:
Patent Business Corporation Otsuka International Patent Office