PURPOSE: To prevent the contamination of the inner wall of a reaction tube and to form a good thin film at the time of forming a diamondlike carbon film by plasma CVD by previously forming a plasma layer of hydrogen or oxygen on the inner wall of the reaction tube.
CONSTITUTION: A diamondlike carbon thin film is formed on the surface of a metallic magnetic film 7 by this device. The plasma layer of hydrogen or oxygen is formed on the inner wall of a reaction tube 1. Consequently, even if diamondlike carbon is deposited on the inner wall of the reaction tube 1 after the thin film forming operation is continued for a long time, the carbon is etched off by the plasma, and a clean state is maintained at all times. Accordingly, the gaseous hydrocarbons to form the thin film are efficiently converted to plasma, and a good diamondlike carbon thin film is formed.
YOSHIDA OSAMU
MIZUNOYA HIROHIDE
WAKABAYASHI SHIGEMI
SHIGA AKIRA
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