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Title:
超音波振動子の製造方法
Document Type and Number:
Japanese Patent JP7048030
Kind Code:
B2
Abstract:
To provide a method for stably manufacturing an ultrasonic transducer capable of emitting high-frequency ultrasonic waves.SOLUTION: An ultrasonic transducer 1 is formed by maintaining mechanical strength by leaving a part of a piezoelectric substrate 10 as a peripheral portion, making an area surrounded by the peripheral portion to a desired thickness, and dividing into pieces.SELECTED DRAWING: Figure 2

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Inventors:
Takeuchi Osamu
Naomi Masumoto
Hiroyuki Kuchichi
Kikuchi Toshikatsu
Application Number:
JP2018054172A
Publication Date:
April 05, 2022
Filing Date:
March 22, 2018
Export Citation:
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Assignee:
New Japan Radio Microdevices Co., Ltd.
International Classes:
H01L41/332; H01L41/338; H04R31/00
Domestic Patent References:
JP2011078118A
JP2012182758A
JP2010098457A
JP8079895A



 
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