Title:
振動式トランスデューサおよび振動式トランスデューサの製造方法
Document Type and Number:
Japanese Patent JP5688690
Kind Code:
B2
Abstract:
A resonant transducer includes a resonator, a resonator electrodes connected to an end part of the resonator, at least one fixed electrode arranged in the vicinity of the resonator, and a buried part formed between the fixed electrode and the resonator electrode. The resonator, the resonator electrodes and the fixed electrode are formed by the same active layer on a substrate.
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Inventors:
吉田 隆司
岩井 滋人
佐々木 義孝
岩井 滋人
佐々木 義孝
Application Number:
JP2013003414A
Publication Date:
March 25, 2015
Filing Date:
January 11, 2013
Export Citation:
Assignee:
横河電機株式会社
International Classes:
H03H9/24; B81B3/00; B81C1/00