To readily and accurately manufacture an inkjet recording head having an ink bubble generation chamber and a heating resistor provided on the inclined face thereof, by using a versatile semiconductor process.

A removable projection 1a which has an inclined face is formed on a substrate 1, and then a heating resistor 5 is formed along the inclined face. An orifice plate is formed so as to cover the whole face of the heating resistor 5, the inclined face, and the substrate 1. After that, the projection 1a is removed to form the ink bubble generation chamber.