Title:
【発明の名称】基板の処理方法
Document Type and Number:
Japanese Patent JPH0691060
Kind Code:
B2
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Inventors:
Kobayashi Masakazu
Tanaka Hatsuyuki
Asami Shingo
Tanaka Hatsuyuki
Asami Shingo
Application Number:
JP29840286A
Publication Date:
November 14, 1994
Filing Date:
December 15, 1986
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
G03F7/42; G03C11/00; H01L21/027; H01L21/30; H01L21/304; (IPC1-7): H01L21/304; G03F7/42; H01L21/027
Domestic Patent References:
| JP5361402A | ||||
| JP612152A |
Attorney, Agent or Firm:
Agata Akira
Next Patent: シリコンウエハの洗浄方法