Title:
PEELING LIQUID CONCENTRATION MEASURING DEVICE
Document Type and Number:
Japanese Patent JP2007155559
Kind Code:
A
Abstract:
To precisely measure the concentration of a peeling agent in peeling liquid.
This peeling liquid concentration measuring device measures the concentration of each of a plurality of solutes that are dissolved in a solvent and contain at least a peeling agent. The peeling liquid concentration measuring device comprises a concentration arithmetic section for calculating the concentration of each solute based on an output from a temperature detector, an output from a specific physical property detector, and an output from a speed arithmetic section, and an output section for outputting a conversion result of the concentration arithmetic section.
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Inventors:
ARAMATSU MIKI
OGOSHI NAOKI
HACHISUGA HAJIME
OGOSHI NAOKI
HACHISUGA HAJIME
Application Number:
JP2005352701A
Publication Date:
June 21, 2007
Filing Date:
December 06, 2005
Export Citation:
Assignee:
YAMAMOTO DENKI INSTR KK
FUJI INDUSTRIES CO LTD
FUJI INDUSTRIES CO LTD
International Classes:
G01N29/00; G01N27/22; G01N29/02; G03F7/42; H01L21/027; H01L21/304
Attorney, Agent or Firm:
Shuji Shiokawa
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