Title:
ポジ型感放射線性樹脂組成物およびネガ型感放射線性樹脂組成物
Document Type and Number:
Japanese Patent JP4577354
Kind Code:
B2
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Inventors:
Rui Ebata
Wang Yong
Wang Yong
Application Number:
JP2007326118A
Publication Date:
November 10, 2010
Filing Date:
December 18, 2007
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
G03F7/039; C07C69/96; C07C309/19; C07C403/12; G03F7/004; G03F7/038
Domestic Patent References:
| JP2003337416A | ||||
| JP2001199955A | ||||
| JP9179303A |
Foreign References:
| WO2002090426A1 |
Attorney, Agent or Firm:
Toshiaki Fukuzawa