Title:
半導体装置およびその製造方法
Document Type and Number:
Japanese Patent JP4562950
Kind Code:
B2
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Inventors:
Junichi Ueno
Application Number:
JP2001164499A
Publication Date:
October 13, 2010
Filing Date:
May 31, 2001
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
H01L21/60
Domestic Patent References:
| JP2000294598A | ||||
| JP2000154250A | ||||
| JP2000302841A | ||||
| JP2001019745A | ||||
| JP10209203A | ||||
| JP4065136A | ||||
| JP2000003976A | ||||
| JP9252063A | ||||
| JP2002190499A |
Attorney, Agent or Firm:
Hiromori Arai