Title:
流体流れを制御するシステム、コンピュータプログラム製品、及び、方法
Document Type and Number:
Japanese Patent JP4729504
Kind Code:
B2
Abstract:
Embodiments of the present invention provide systems and methods of controlling fluid dispense to ensure clean break off of fluid at the end of a dispense process and to reduce crystallization of fluid in the dispense nozzle. One embodiment of the present invention can include a controller that can, generate a flow control signal to cause a control valve to close according to a first close rate parameter for a first segment of the close range and to generate the flow control signal to cause the control valve to close according to a second close rate parameter for a second segment of the close range.
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Inventors:
Lava Deer, Mark
Macroglen, Robert F.
Macroglen, Robert F.
Application Number:
JP2006553171A
Publication Date:
July 20, 2011
Filing Date:
February 07, 2005
Export Citation:
Assignee:
Entegres, Incorporated
International Classes:
H01L21/31; G05D7/00; G05D7/06; G05D11/00
Domestic Patent References:
| JP2000161514A | ||||
| JP10274016A |
Attorney, Agent or Firm:
Hidesaku Yamamoto
Takaaki Yasumura
Natsuki Morishita
Takaaki Yasumura
Natsuki Morishita