To provide a tactile sensor element capable of measuring shear force with a simple structure.
A tactile sensor element 2 comprises: a substrate 10 having openings 11A, 11B, 11C, and 11D; a support film 12 covering the openings 11A, 11B, 11C, and 11D; detection sections 13A, 13B, 13C, and 13D located on the support film 12 and above the openings 11A, 11B, 11C, and 11D; an elastic member 16A located on the detection sections 13A and 13B; and an elastic member 16B located on the detection sections 13C and 13D. The segment line between the centroid of the opening 11A and the centroid of the opening 11B is apart from and not in parallel with the segment line between the centroid of the opening 11C and the centroid of the opening 11D in a plan view from the thickness direction of the substrate 10. The elastic member 16A covers the detection sections 13A, 13B, and an area of the support film 12 between the detection section 13A and the detection section 13B in the plan view. The elastic member 16B covers the detection sections 13C, 13D, and an area of the support film 12 between the detection section 13C and the detection section 13D in the plan view.
MURAKAMI KENJI
NISHIWAKI MANABU
