A light filter manufacture device containing a mask and this

Japanese Patent JP6025909

B2

A mask and an optical filter manufacturing apparatus having the same are provided. The optical filter manufacturing apparatus includes a roll used in a roll-to-roll process, a base film wound around the roll, a light source that generates light for exposure, a polarizing plate that is installed at an emission side of the light source and polarizes light generated from the light source, and a mask that causes a pattern to be formed on the base film and includes a plurality of guide slits that are opened to have a predetermined thickness and a predetermined width. According to the present invention, the entire surface of the base film can be irradiated with a uniform light quantity. Thus, a pattern can be uniformly formed on the base film, the quality of a product can be improved, and the characteristics of the base film can be accurately realized.

JP4671473	A mask data correction device, a method for manufacturing a transfer mask, and a method for manufacturing a device having a pattern structure.
JP2002311563	DEVICE AND METHOD FOR GENERATING CORRECTION TABLE, DEVICE AND METHOD FOR GENERATING MASK PATTERN FOR CORRECTION TABLE, DEVICE AND METHOD FOR GENERATING MASK PATTERN FOR FINE WORKING, AND METHOD FOR FORMING FINE WORKING PATTERN
JP2000091436	LSI PATTERN-LAYOUT CREATING METHOD, LSI-PATTERN FORMING METHOD, AND MANUFACTURE OF LSI

Kim, Shin Yang
Hong, Kyunki
Yoon, Huk
Ju, Won Churu
Cho, Yong Il
Park, Moon Saw
Ko, Dong Ho
Ryu, Su Yang

JP2015089670A

November 16, 2016

April 24, 2015

Click for automatic bibliography generation  

LG HAUSYS,LTD.

G03F1/70; G02B5/30; G02F1/1337; G03F7/22

JP2006201273A
JP10153707A
JP2001159713A
JP8248618A
JP2006201538A
JP2009145539A
JP2005033179A
JP2006293197A

WO2007086474A1

Longhua International Patent Service Corporation

Previous Patent: Slot machine

Next Patent: JPS6025910