Title:
The polish liquid composition thing for silicon wafers
Document Type and Number:
Japanese Patent JP6168984
Kind Code:
B2
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Inventors:
Minoru Miura
Yoshiaki Matsui
Yuki Kato
Yoshiaki Matsui
Yuki Kato
Application Number:
JP2013265491A
Publication Date:
July 26, 2017
Filing Date:
December 24, 2013
Export Citation:
Assignee:
Kao Corporation
International Classes:
H01L21/304; B24B37/00; C09G1/02; C09K3/14
Domestic Patent References:
| JP2013222863A | ||||
| JP2010010167A | ||||
| JP2009035701A | ||||
| JP10022241A |
Foreign References:
| WO2013157554A1 |
Attorney, Agent or Firm:
Ikeuchi, Sato & Partners
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