Title:
フェニルインドール含有ノボラック樹脂を含むレジスト下層膜形成組成物
Document Type and Number:
Japanese Patent JPWO2013146670
Kind Code:
A
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Inventors:
Hirokazu Nishimaki
Sakamoto Rikimaru
Keisuke Hashimoto
Tetsuya Shinjo
Yasunobu Someya
Ryo Karasawa
Sakamoto Rikimaru
Keisuke Hashimoto
Tetsuya Shinjo
Yasunobu Someya
Ryo Karasawa
Application Number:
JP2013058557W
Publication Date:
December 14, 2015
Filing Date:
March 25, 2013
Export Citation:
Assignee:
Nissan Chemical Industries, Ltd.
International Classes:
H01L21/027; G03F7/11; C08G12/26
Attorney, Agent or Firm:
萼 経夫
宮崎 嘉夫
加藤 勉
伴 知篤
宮崎 嘉夫
加藤 勉
伴 知篤