Title:
ANALYSIS METHOD
Document Type and Number:
WIPO Patent Application WO/2024/034344
Kind Code:
A1
Abstract:
This analysis method includes: a step for acquiring first information pertaining to the optical density of a functional group on the basis of a first fluorescence spectrum measured by irradiating a prescribed region of a specimen with first light; a step for acquiring second information pertaining to the optical density of a functional group on the basis of a second fluorescence spectrum measured by irradiating at least a part of the prescribed region with second light, after the irradiation by the first light; and a step for acquiring third information pertaining to degradation of the specimen on the basis of the first information and the second information.
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Inventors:
KAWAGUCHI MAKOTO (JP)
YONETANI YUKI (JP)
ICHIHARA SHIGERU (JP)
YONETANI YUKI (JP)
ICHIHARA SHIGERU (JP)
Application Number:
PCT/JP2023/026495
Publication Date:
February 15, 2024
Filing Date:
July 20, 2023
Export Citation:
Assignee:
CANON KK (JP)
International Classes:
G01N21/64; G01N21/65
Foreign References:
| JP2018529106A | 2018-10-04 | |||
| JP2017079845A | 2017-05-18 | |||
| JP2006308308A | 2006-11-09 | |||
| JP2015175641A | 2015-10-05 | |||
| CN113030039A | 2021-06-25 |
Other References:
TAKAYA SATOSHI, YUKI NISHINA, YOHEI HAMURA, TAKUJI YAMADA, YOICHI TSUKUDA, TAKASHI YAMAMOTO, YOSHIKAZU TAKAHASHI: "Deterioration Index of Acrylic Top Coat by Raman Spectroscopy", JOURNAL OF THE SOCIETY OF MATERIALS SCIENCE, JAPAN, vol. 68, no. 10, 1 October 2019 (2019-10-01), pages 779 - 784, XP093138391, ISSN: 1880-7488, DOI: 10.2472/jsms.68.779
Attorney, Agent or Firm:
ABE Takuma et al. (JP)
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