GRAPH DISPLAY METHOD FOR POLISHING DEVICE, AND COMPUTER PROGRAM

Title:

GRAPH DISPLAY METHOD FOR POLISHING DEVICE, AND COMPUTER PROGRAM

Document Type and Number:

WIPO Patent Application WO/2024/057749

Kind Code:

A1

Abstract:

The present invention enables data of interest to be found quickly from among multiple sets of measured data in a polishing device.　Provided is a method for displaying measured data relating to a polishing device as a graph. The method includes: a step for acquiring, from the polishing device, a plurality of series of measured data measured in the polishing device; a step for creating graphs corresponding to each of the plurality of series of measured data; a step for classifying the plurality of created graphs into a plurality of groups on the basis of a similarity of the graph shapes; and a step for displaying the plurality of graphs in an overlaid manner, using a different display mode for each group.

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Inventors:

SHIMIZU YUKO (JP)
WATANABE HIROMITSU (JP)
SUGITA RYUJI (JP)
YANAI AKIO (JP)
WATANABE DAICHI (JP)

Application Number:

PCT/JP2023/028049

Publication Date:

March 21, 2024

Filing Date:

August 01, 2023

Export Citation:

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Assignee:

EBARA CORP (JP)

International Classes:

B24B37/013; B23Q17/00; B23Q17/24; B24B37/00; G06T11/60; H01L21/304

Domestic Patent References:

WO2016163170A1

2016-10-13

Foreign References:

JP2013529386A	2013-07-18
JPH07230446A	1995-08-29
JP2022010553A	2022-01-17
JP2007207173A	2007-08-16

Attorney, Agent or Firm:

MIYAMAE, Toru et al. (JP)

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