Title:
IDENTIFICATION METHOD FOR SUBSTRATE CORNER POSITION
Document Type and Number:
WIPO Patent Application WO/2018/047650
Kind Code:
A1
Abstract:
[Problem] To provide practical technology for achieving the ability to identify a corner position for a rectangular substrate with high precision. [Solution] A camera 4 takes an image of an imaging area 41 after a rectangular substrate S is positioned such that a corner is positioned within the imaging area 41 for the camera 4. When the substrate S is determined to have a corner within the imaging area 41 by a blob Bs detected by binarizing image data, the outermost boundary points P from dark to light in the X direction scan lines Lx are made X direction edge point candidates, and the outermost boundary points P from dark to light in the Y direction scan lines Ly are made Y direction edge point candidates. The intersection of an approximate line passing through the X direction edge point candidates and an approximate line passing through the Y direction edge point candidates is identified as the substrate corner C position.
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Inventors:
NAKAJIMA YU (JP)
OOYA YOSHIYUKI (JP)
OOYA YOSHIYUKI (JP)
Application Number:
PCT/JP2017/030709
Publication Date:
March 15, 2018
Filing Date:
August 28, 2017
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
G03F7/20; G01B11/00; G06T1/00
Foreign References:
| JPH02307167A | 1990-12-20 | |||
| JP2002288678A | 2002-10-04 | |||
| JP2003017545A | 2003-01-17 | |||
| JP2009003964A | 2009-01-08 | |||
| JPH0320879A | 1991-01-29 | |||
| JP2014205286A | 2014-10-30 |
Attorney, Agent or Firm:
HOTATE Koichi (JP)
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