LACTONE COMPOUND, LACTONE-CONTAINING MONOMER, POLYMER OF THOSE, RESIST COMPOSITION USING SAME, METHOD FOR FORMING PATTERN USING SAME

WIPO Patent Application WO/2006/030609

A1

Disclosed are novel first to fourth lactone compounds. The first lactone compound is represented by the formula (1) below. (1) In the formula, X represents CH₂, CH₂CH₂, O, S or NR¹; R¹ represents a hydrogen atom or a straight chain, branched or cyclic alkyl group having 1-10 carbon atoms. A part or all of hydrogen atoms in the alkyl group may be substituted by fluorine atoms, and a part of the alkyl group may include an atomic group containing an oxygen atom, a sulfur atom, a nitrogen atom, a carbon-carbon double bond, a carbonyl group, a hydroxy group or a carboxyl group.

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SUMIDA SHINICHI
KOMORIYA HARUHIKO
SUZUKI KATSUTOSHI
MAEDA KAZUHIKO

PCT/JP2005/015355

March 23, 2006

August 24, 2005

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CENTRAL GLASS CO LTD (JP)
SUMIDA SHINICHI
KOMORIYA HARUHIKO
SUZUKI KATSUTOSHI
MAEDA KAZUHIKO

C08F20/28; C07D311/94; G03F7/039; H01L21/027

JP2002162745A	2002-06-07
JP2003002882A	2003-01-08
JP2004175981A	2004-06-24
JP2003005374A	2003-01-08
JP2003055363A	2003-02-26

DAVIES D ET AL: "Contrasting reactions of silver perchlorate and silver tosylate with 6-endo-hydroxy-5-exo-iodonorborn-2-endo-ylacetic acid-lactone.", CHEMISTRY & INDUSTRY., vol. 19, 1981, pages 693 - 694, XP002987712

Hashimoto, Takeshi c/o Shiga, Patent Office (Ekisaikai Bldg. 1-29, Akashi-ch, Chuo-ku Tokyo 44, JP)

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