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Title:
LAYOUT CORRECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2022/037244
Kind Code:
A1
Abstract:
A layout correction method, comprising: providing an initial layout (10) (S11); expanding the initial layout (10) to obtain an expanded layout (11) (S12); correcting the expanded layout (11) to obtain a corrected layout (12) (S13); and obtaining a target layout (13) on the basis of the corrected layout (S14).

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Inventors:
XU TINGTING (CN)
Application Number:
PCT/CN2021/101500
Publication Date:
February 24, 2022
Filing Date:
June 22, 2021
Export Citation:
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Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
G03F1/72; G03F1/36
Foreign References:
CN112506000A2021-03-16
CN107706103A2018-02-16
CN108776421A2018-11-09
CN109494185A2019-03-19
CN110119063A2019-08-13
US20200074031A12020-03-05
US20130305195A12013-11-14
Attorney, Agent or Firm:
ADVANCE CHINA IP LAW OFFICE (CN)
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